Use of cluster secondary ions for minimization of matrix effects in the SIMS depth profiling of La/B4C multilayer nanostructures

2010 ◽  
Vol 4 (5) ◽  
pp. 807-810 ◽  
Author(s):  
M. N. Drozdov ◽  
Yu. N. Drozdov ◽  
M. M. Barysheva ◽  
V. N. Polkovnikov ◽  
N. I. Chkhalo
Keyword(s):  
Matrix Effects ◽  
Depth Profiling ◽  
Multilayer Nanostructures ◽  
Secondary Ions ◽  
Sims Depth Profiling

SIMS Depth Profiling Free of Martix Effects

2005 ◽  
Vol 908 ◽  
Author(s):  
Peter Huber ◽  
Helmut Karl ◽  
Bernd Stritzker
Keyword(s):  
Elemental Concentration ◽  
Secondary Ion Mass Spectrometry ◽  
Matrix Effects ◽  
Depth Profiling ◽  
High Dose ◽  
Concentration Depth Profile ◽  
The Matrix ◽  
Elemental Depth ◽  
Secondary Ion ◽  
Sims Depth Profiling

AbstractWe present a method of determining elemental depth profiles with secondary ion mass spectrometry (SIMS) corrected by all non-linearities between the SIMS countrate and the elemental concentration caused by chemical matrix effects, resulting in an absolute concentration depth profile. The key to this method is a low dose ion implantation step of corresponding reference isotopes prior to SIMS depth profiling. Spectra evaluation is performed on the basis of a selfconsistent evaluation in which the depth dependent influence of the matrix is determined. The technique is demonstrated for sequentially high dose ion implanted Cd and Se in SiO2.

SIMS depth profiling analysis of P-doped n-type Si layer to develop the Si QD solar cell

2014 ◽  
Vol 46 (S1) ◽  
pp. 341-343
Author(s):  
Tae Woon Kim ◽  
Hyun Jeong Baek ◽  
Jong Shik Jang ◽  
Seung Mi Lee ◽  
Kyung Joong Kim
Keyword(s):  
Solar Cell ◽  
Depth Profiling ◽  
Profiling Analysis ◽  
Sims Depth Profiling

The effect of orientation on ion beam erosion rates in ionic crystals measured by SIMS depth profiling

1991 ◽  
Vol 17 (3) ◽  
pp. 158-164 ◽  
Author(s):  
A. M. C. Kilner ◽  
J. A. Kilner ◽  
J. C. Elliott ◽  
G. Cressey ◽  
S. D. Littlewood
Keyword(s):  
Ion Beam ◽  
Depth Profiling ◽  
Ionic Crystals ◽  
Erosion Rates ◽  
Sims Depth Profiling
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