SIMS depth profiling of Pd/B4C, Ni/C, and Cr/Sc multilayer metal structures using registration of cluster secondary ions: The problem of depth resolution enhancement

2011 ◽  
Vol 75 (1) ◽  
pp. 100-104 ◽  
Author(s):  
M. N. Drozdov ◽  
Yu. N. Drozdov ◽  
M. M. Barysheva ◽  
V. N. Polkovnikov ◽  
N. I. Chkhalo
Keyword(s):  
Resolution Enhancement ◽  
Depth Profiling ◽  
Depth Resolution ◽  
Metal Structures ◽  
Secondary Ions ◽  
Sims Depth Profiling ◽  
Multilayer Metal

Secondary cluster ions Ge 2 − and Ge 3 − for improving depth resolution of SIMS depth profiling of GeSi/Si heterostructures

2010 ◽  
Vol 44 (3) ◽  
pp. 401-404 ◽  
Author(s):  
M. N. Drozdov ◽  
Yu. N. Drozdov ◽  
D. N. Lobanov ◽  
A. V. Novikov ◽  
D. V. Yurasov
Keyword(s):  
Depth Profiling ◽  
Depth Resolution ◽  
Cluster Ions ◽  
Secondary Cluster ◽  
Sims Depth Profiling
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