Outlier distribution detection approach to semiconductor wafer fabrication process monitoring

2011 3rd Asia Symposium on Quality Electronic Design (ASQED) ◽

10.1109/asqed.2011.6111703 ◽

2011 ◽

Author(s):

Huiyuan Cheng ◽

Melanie Po-Leen Ooi ◽

Ye Chow Kuang ◽

Serge Demidenko ◽

Bryan Cheah

Keyword(s):

Process Monitoring ◽

Fabrication Process ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Detection Approach ◽

Semiconductor Wafer Fabrication

Download Full-text

Order-lot pegging for minimizing total tardiness in semiconductor wafer fabrication process

Journal of the Operational Research Society ◽

10.1057/jors.2011.133 ◽

2012 ◽

Vol 63 (9) ◽

pp. 1258-1270 ◽

Author(s):

J-G Kim ◽

S-K Lim

Keyword(s):

Fabrication Process ◽

Total Tardiness ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

Download Full-text

Shift scheduling for steppers in the semiconductor wafer fabrication process

IIE Transactions ◽

10.1080/07408170208928859 ◽

2002 ◽

Vol 34 (2) ◽

pp. 167-177 ◽

Author(s):

SOOYOUNG KIM ◽

SEUNG-HEE YEA ◽

BOKANG KIM

Keyword(s):

Fabrication Process ◽

Wafer Fabrication ◽

Shift Scheduling ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

Download Full-text

A performance model of automated material handling systems with double closed-loops and shortcuts in 300 mm semiconductor wafer fabrication systems

Journal of Manufacturing Systems ◽

10.1016/j.jmsy.2020.12.006 ◽

2021 ◽

Vol 58 ◽

pp. 316-334

Author(s):

Lihui Wu ◽

Zhongwei Zhang ◽

Jie Zhang ◽

Ray Y. Zhong ◽

Junliang Wang

Keyword(s):

Material Handling ◽

Performance Model ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Closed Loops ◽

Material Handling Systems ◽

Semiconductor Wafer Fabrication ◽

Automated Material Handling ◽

Automated Material Handling Systems ◽

Download Full-text

Scheduling semiconductor wafer fabrication

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/66.4384 ◽

1988 ◽

Vol 1 (3) ◽

pp. 115-130 ◽

Author(s):

L.M. Wein

Keyword(s):

Wafer Fabrication ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

Download Full-text

AN ANALYSIS OF DISPATCHING RULES IN A SEMICONDUCTOR WAFER FABRICATION ENVIRONMENT

Journal of Electronics Manufacturing ◽

10.1142/s0960313195000190 ◽

1995 ◽

Vol 05 (03) ◽

pp. 165-174 ◽

Author(s):

THOMAS McCUTCHEN ◽

CHUNG-YEE LEE

Keyword(s):

Wafer Fabrication ◽

Dispatching Rules ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

Download Full-text

Modeling of photolithography process in semiconductor wafer fabrication systems using extended hybrid Petri nets

Journal of Central South University of Technology ◽

10.1007/s11771-007-0077-1 ◽

2007 ◽

Vol 14 (3) ◽

pp. 393-398 ◽

Author(s):

Bing-hai Zhou ◽

Qing-zhi Pan ◽

Shi-jin Wang ◽

Bin Wu

Keyword(s):

Wafer Fabrication ◽

Semiconductor Wafer ◽

Hybrid Petri Nets ◽

Semiconductor Wafer Fabrication ◽

Photolithography Process

Download Full-text

Simulation-based performance assessment of production planning formulations for semiconductor wafer fabrication

2015 Winter Simulation Conference (WSC) ◽

10.1109/wsc.2015.7408392 ◽

2015 ◽

Author(s):

Timm Ziarnetzky ◽

N. Baris Kacar ◽

Lars Monch ◽

Reha Uzsoy

Keyword(s):

Performance Assessment ◽

Production Planning ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Simulation Based ◽

Semiconductor Wafer Fabrication

Download Full-text

A Throughput Management System for Semiconductor Wafer Fabrication Facilities: Design, Systems and Implementation

Processes ◽

10.3390/pr6020016 ◽

2018 ◽

Vol 6 (2) ◽

pp. 16 ◽

Author(s):

Liam Hsieh ◽

Tsung-Ju Hsieh

Keyword(s):

Management System ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Facilities Design ◽

Semiconductor Wafer Fabrication ◽

Download Full-text

Production Scheduling of Semiconductor Wafer Fabrication Facilities Using Real-Time Combinatorial Dispatching Rule

International Conference on Reliable Systems Engineering (ICoRSE) - 2021 - Lecture Notes in Networks and Systems ◽

10.1007/978-3-030-83368-8_8 ◽

2021 ◽

pp. 78-90

Author(s):

Suraj Panigrahi ◽

Srijeta Agrahari ◽

José Machado ◽

V. K. Manupati

Keyword(s):

Real Time ◽

Production Scheduling ◽

Wafer Fabrication ◽

Dispatching Rule ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

Download Full-text

Dynamic Release Control Policy for the Semiconductor Wafer Fabrication Lines

Journal of the Operational Research Society ◽

10.1057/jors.1996.195 ◽

1996 ◽

Vol 47 (12) ◽

pp. 1516-1525 ◽

Author(s):

Jongsoo Kim ◽

Robert C. Leachman ◽

Byungkyoo Suh

Keyword(s):

Control Policy ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication ◽

Release Control

Download Full-text