Multiplexed CMOS Sensor Arrays for Die Stress Mapping

This paper reports high resolution die stress measurements using a multiplexed array of 512 current mirror type CMOS piezoresistive FET stress sensor cells fabricated on an MOSIS tiny chip. Using 1.5 μm CMOS technology, a stress mapping resolution of 256 points/mm2 has been obtained, providing high spatial resolution mapping of the stress on the surface of the integrated circuit die. Driven by an on-chip counter, the sequentially scanned array efficiently maps the two-dimensional stress field. The sensor array is calibrated using a chip-on-beam calibration technique. These CMOS sensor arrays have been used to map stress on the die in the chip-on-beam configuration under four-point-bending load, in encapsulated chip-on-beam samples, and in DIP40 packages with cavities filled with underfill. The measured stress distribution agrees well with finite element simulation results, and permit smooth measurement of stress gradients on the surface of the integrated circuit die. The results give clear verification that the NMOS PiFET sensors are indeed responding to shear stresses.

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CMOS Sensor Arrays for High Resolution Die Stress Mapping in Packaged Integrated Circuits

IEEE Sensors Journal ◽

10.1109/jsen.2013.2247590 ◽

2013 ◽

Vol 13 (6) ◽

pp. 2066-2076 ◽

Cited By ~ 27

Author(s):

Yonggang Chen ◽

Richard C. Jaeger ◽

Jeffrey C. Suhling

Keyword(s):

High Resolution ◽

Integrated Circuits ◽

Sensor Arrays ◽

Cmos Sensor ◽

Die Stress ◽

Stress Mapping

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Nanoscale Electrochemical Sensing and Processing in Microreactors

Annual Review of Analytical Chemistry ◽

10.1146/annurev-anchem-061417-125642 ◽

2018 ◽

Vol 11 (1) ◽

pp. 421-440 ◽

Cited By ~ 2

Author(s):

Mathieu Odijk ◽

Albert van den Berg

Keyword(s):

Carbon Nanomaterials ◽

Sensor Arrays ◽

Electrochemical Sensing ◽

Artificial Kidney ◽

Spectroscopic Techniques ◽

Cmos Sensor ◽

Drug Synthesis ◽

The Internet Of Things ◽

Signal Readout

In this review, we summarize recent advances in nanoscale electrochemistry, including the use of nanoparticles, carbon nanomaterials, and nanowires. Exciting developments are reported for nanoscale redox cycling devices, which can chemically amplify signal readout. We also discuss promising high-frequency techniques such as nanocapacitive CMOS sensor arrays or heterodyning. In addition, we review electrochemical microreactors for use in (drug) synthesis, biocatalysis, water treatment, or to electrochemically degrade urea for use in a portable artificial kidney. Electrochemical microreactors are also used in combination with mass spectrometry, e.g., to study the mimicry of drug metabolism or to allow electrochemical protein digestion. The review concludes with an outlook on future perspectives in both nanoscale electrochemical sensing and electrochemical microreactors. For sensors, we see a future in wearables and the Internet of Things. In microreactors, a future goal is to monitor the electrochemical conversions more precisely or ultimately in situ by combining other spectroscopic techniques.

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