High Precision Position Control based on Active Disturbance Rejection Control for Galvanometer Scanner System
2019 ◽
pp. 437-448
2019 ◽
Vol 7
(1)
◽
pp. 97-108
◽
2014 ◽
Vol 551
◽
pp. 541-547
2018 ◽
Vol 233
(10)
◽
pp. 3659-3669
◽
2015 ◽
Vol 39
(19)
◽
pp. 5936-5948
◽