Feasibility analysis of the stacked-die ceramic packaging process in automotive electronics

Author(s):  
Chongchong Mao ◽  
Yuan Zhu ◽  
Lianghai Li
2001 ◽  
Vol 120 (5) ◽  
pp. A599-A599
Author(s):  
D AHLQUIST ◽  
S THIBODEAU ◽  
B LEVIN ◽  
J JEN ◽  
M DEVENS ◽  
...  
Keyword(s):  

IEE Review ◽  
1992 ◽  
Vol 38 (1) ◽  
pp. 32 ◽  
Author(s):  
M.H. Westbrook

IEE Review ◽  
1988 ◽  
Vol 34 (5) ◽  
pp. 202
Author(s):  
C.H.G. Mills

2017 ◽  
Vol 137 (2) ◽  
pp. 48-58
Author(s):  
Noriyuki Fujimori ◽  
Takatoshi Igarashi ◽  
Takahiro Shimohata ◽  
Takuro Suyama ◽  
Kazuhiro Yoshida ◽  
...  

Author(s):  
Erika Schutte ◽  
Jack Martin

Abstract An ellipsometry based measurement protocol was developed to evaluate changes to MEMS sensor surfaces which may occur during packaging using unpatterned test samples. This package-level technique has been used to measure the 0-20 Angstrom thin films that can form or deposit on die during the packaging process for a variety of packaging processing conditions. Correlations with device performance shows this to be a useful tool for packaged MEMS device and process characterization.


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