Modelling of semiconductor wafer fabrication systems by extended object-oriented Petri nets

International Journal of Production Research ◽

10.1080/0020754042000264563 ◽

2005 ◽

Vol 43 (3) ◽

pp. 471-495 ◽

Author(s):

Huiran Liu ◽

Richard Y. K. Fung ◽

Zhibin Jiang

Keyword(s):

Object Oriented ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Extended Object ◽

Semiconductor Wafer Fabrication

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An Extended Object-oriented Petri Nets Modeling Based Simulation Platform for Real-time Scheduling of Semiconductor Wafer Fabrication System

2006 IEEE International Conference on Systems, Man and Cybernetics ◽

10.1109/icsmc.2006.384646 ◽

2006 ◽

Author(s):

Huai Zhang ◽

Zhibin Jiang ◽

Chengtao Guo ◽

Huiran Liu

Keyword(s):

Real Time ◽

Object Oriented ◽

Wafer Fabrication ◽

Simulation Platform ◽

Semiconductor Wafer ◽

Real Time Scheduling ◽

Extended Object ◽

Semiconductor Wafer Fabrication ◽

Time Scheduling

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Modeling of photolithography process in semiconductor wafer fabrication systems using extended hybrid Petri nets

Journal of Central South University of Technology ◽

10.1007/s11771-007-0077-1 ◽

2007 ◽

Vol 14 (3) ◽

pp. 393-398 ◽

Author(s):

Bing-hai Zhou ◽

Qing-zhi Pan ◽

Shi-jin Wang ◽

Bin Wu

Keyword(s):

Wafer Fabrication ◽

Semiconductor Wafer ◽

Hybrid Petri Nets ◽

Semiconductor Wafer Fabrication ◽

Photolithography Process

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Performance modeling, real-time dispatching and simulation of wafer fabrication systems using timed extended object-oriented Petri nets

Computers & Industrial Engineering ◽

10.1016/j.cie.2008.04.006 ◽

2009 ◽

Vol 56 (1) ◽

pp. 121-137 ◽

Author(s):

Huiran Liu ◽

Zhibin Jiang ◽

Richard Y.K. Fung

Keyword(s):

Real Time ◽

Performance Modeling ◽

Object Oriented ◽

Wafer Fabrication ◽

Extended Object

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Queueing Generalized Stochastic Colored Timed Petri Nets-based Approach to Modeling for Semiconductor Wafer Fabrication

2007 IEEE International Conference on Control and Automation ◽

10.1109/icca.2007.4376879 ◽

2007 ◽

Author(s):

Zheng-Cai Cao ◽

Fei Qiao ◽

Qi-Di Wu

Keyword(s):

Wafer Fabrication ◽

Timed Petri Nets ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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A performance model of automated material handling systems with double closed-loops and shortcuts in 300 mm semiconductor wafer fabrication systems

Journal of Manufacturing Systems ◽

10.1016/j.jmsy.2020.12.006 ◽

2021 ◽

Vol 58 ◽

pp. 316-334

Author(s):

Lihui Wu ◽

Zhongwei Zhang ◽

Jie Zhang ◽

Ray Y. Zhong ◽

Junliang Wang

Keyword(s):

Material Handling ◽

Performance Model ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Closed Loops ◽

Material Handling Systems ◽

Semiconductor Wafer Fabrication ◽

Automated Material Handling ◽

Automated Material Handling Systems ◽

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Scheduling semiconductor wafer fabrication

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/66.4384 ◽

1988 ◽

Vol 1 (3) ◽

pp. 115-130 ◽

Author(s):

L.M. Wein

Keyword(s):

Wafer Fabrication ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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AN ANALYSIS OF DISPATCHING RULES IN A SEMICONDUCTOR WAFER FABRICATION ENVIRONMENT

Journal of Electronics Manufacturing ◽

10.1142/s0960313195000190 ◽

1995 ◽

Vol 05 (03) ◽

pp. 165-174 ◽

Author(s):

THOMAS McCUTCHEN ◽

CHUNG-YEE LEE

Keyword(s):

Wafer Fabrication ◽

Dispatching Rules ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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Simulation-based performance assessment of production planning formulations for semiconductor wafer fabrication

2015 Winter Simulation Conference (WSC) ◽

10.1109/wsc.2015.7408392 ◽

2015 ◽

Author(s):

Timm Ziarnetzky ◽

N. Baris Kacar ◽

Lars Monch ◽

Reha Uzsoy

Keyword(s):

Performance Assessment ◽

Production Planning ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Simulation Based ◽

Semiconductor Wafer Fabrication

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A Throughput Management System for Semiconductor Wafer Fabrication Facilities: Design, Systems and Implementation

Processes ◽

10.3390/pr6020016 ◽

2018 ◽

Vol 6 (2) ◽

pp. 16 ◽

Author(s):

Liam Hsieh ◽

Tsung-Ju Hsieh

Keyword(s):

Management System ◽

Wafer Fabrication ◽

Semiconductor Wafer ◽

Facilities Design ◽

Semiconductor Wafer Fabrication ◽

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Production Scheduling of Semiconductor Wafer Fabrication Facilities Using Real-Time Combinatorial Dispatching Rule

International Conference on Reliable Systems Engineering (ICoRSE) - 2021 - Lecture Notes in Networks and Systems ◽

10.1007/978-3-030-83368-8_8 ◽

2021 ◽

pp. 78-90

Author(s):

Suraj Panigrahi ◽

Srijeta Agrahari ◽

José Machado ◽

V. K. Manupati

Keyword(s):

Real Time ◽

Production Scheduling ◽

Wafer Fabrication ◽

Dispatching Rule ◽

Semiconductor Wafer ◽

Semiconductor Wafer Fabrication

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