Development of high-frequency bulk acoustic wave (BAW) resonators as biosensors and bioactuators
2020 ◽
Vol 59
(3)
◽
pp. 036506
◽
Keyword(s):
2009 ◽
Vol 20
(12)
◽
pp. 124007
◽
Keyword(s):
Keyword(s):
Keyword(s):
2020 ◽
Vol 69
(4)
◽
pp. 1783-1793
◽
Keyword(s):
Keyword(s):