Development of high frequency bulk acoustic wave resonator using thinned single-crystal Lithium Niobate

2006 ◽  
Author(s):  
D. Gachon ◽  
G. Lengaigne ◽  
L. Gauthier-Manuel ◽  
V. Laude ◽  
S. Ballandras
Keyword(s):  
Lithium Niobate ◽  
Acoustic Wave ◽  
Single Crystal ◽  
High Frequency ◽  
Bulk Acoustic Wave ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator

Fabrication of High Frequency Bulk Acoustic Wave Resonator Using Thinned Single-Crystal Lithium Niobate Layers

2008 ◽  
Vol 362 (1) ◽  
pp. 30-40 ◽  
Author(s):  
D. Gachon ◽  
E. Courjon ◽  
G. Martin ◽  
L. Gauthier-Manuel ◽  
J.-C. Jeannot ◽  
...  
Keyword(s):  
Lithium Niobate ◽  
Acoustic Wave ◽  
Single Crystal ◽  
High Frequency ◽  
Bulk Acoustic Wave ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator

scholarly journals The thin film bulk acoustic wave resonator based on single-crystalline 43○Y-cut lithium niobate thin films

AIP Advances ◽  
2020 ◽  
Vol 10 (7) ◽  
pp. 075002
Author(s):  
Xiaoyuan Bai ◽  
Yao Shuai ◽  
Lu Lv ◽  
Ying Xing ◽  
Jiaoling Zhao ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Lithium Niobate ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Single Crystalline ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator ◽  
Film Bulk

Lithium niobate film bulk acoustic wave resonator for sub-6 GHz filters

2020 ◽  
Author(s):  
Marie Bousquet ◽  
Pierre Perreau ◽  
Catherine Maeder-Pachurka ◽  
Alice Joulie ◽  
Fanny Delaguillaumie ◽  
...  
Keyword(s):  
Lithium Niobate ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator ◽  
Film Bulk
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