Vertically Stacked Gate-All-Around Si Nanowire CMOS Transistors with Reduced Vertical Nanowires Separation, New Work Function Metal Gate Solutions, and DC/AC Performance Optimization

2018 ◽  
Author(s):  
R. Ritzenthaler ◽  
H. Mertens ◽  
V. Pena ◽  
G. Santoro ◽  
A. Chasin ◽  
...  
Keyword(s):  
Work Function ◽  
Performance Optimization ◽  
New Work ◽  
Metal Gate ◽  
Si Nanowire ◽  
Cmos Transistors

Dual work function metal gate CMOS transistors by Ni-Ti interdiffusion

2002 ◽  
Vol 23 (4) ◽  
pp. 200-202 ◽  
Author(s):  
I. Polishchuk ◽  
P. Ranade ◽  
T.-J. King ◽  
Chenming Hu
Keyword(s):  
Work Function ◽  
Metal Gate ◽  
Cmos Transistors

Effective Work-Function Modulation by Aluminum-Ion Implantation for Metal-Gate Technology $(\hbox{Poly-Si/TiN/SiO}_{2})$

2007 ◽  
Vol 28 (12) ◽  
pp. 1089-1091 ◽  
Author(s):  
R. Singanamalla ◽  
H. Y. Yu ◽  
B. Van Daele ◽  
S. Kubicek ◽  
K. De Meyer
Keyword(s):  
Ion Implantation ◽  
Work Function ◽  
Metal Gate ◽  
Effective Work ◽  
Effective Work Function ◽  
Aluminum Ion

Investigating doping effects on high-κ metal gate stack for effective work function engineering

2013 ◽  
Vol 88 ◽  
pp. 21-26 ◽  
Author(s):  
C. Leroux ◽  
S. Baudot ◽  
M. Charbonnier ◽  
A. Van Der Geest ◽  
P. Caubet ◽  
...  
Keyword(s):  
Work Function ◽  
Metal Gate ◽  
Gate Stack ◽  
Effective Work ◽  
Effective Work Function ◽  
Doping Effects

Electronic structure and work function of metal gate Mo–W system

2007 ◽  
Vol 91 (9) ◽  
pp. 092106 ◽  
Author(s):  
H. R. Gong ◽  
Kyeongjae Cho
Keyword(s):  
Electronic Structure ◽  
Work Function ◽  
Metal Gate

scholarly journals Performance Evaluation of FD-SOI MOSFETS for Different Metal Gate Work Function

2011 ◽  
Vol 2 (1) ◽  
pp. 11-24 ◽  
Author(s):  
Deepesh Ranka ◽  
Ashwani K. Rana ◽  
Rakesh Kumar Yadav ◽  
Kamalesh Yadav ◽  
Devendra Giri
Keyword(s):  
Performance Evaluation ◽  
Work Function ◽  
Metal Gate ◽  
Gate Work Function
Sign in / Sign up

Export Citation Format

Share Document