Epitaxial Growth Of GaN By HWP(Helicon Wave Plasma) Assisted Metal-Organic CVD (Chemical Vapor Deposition) Process

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) ◽

10.1109/imnc.1998.730059 ◽

1998 ◽

Keyword(s):

Chemical Vapor Deposition ◽

Epitaxial Growth ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Helicon Wave ◽

Metal Organic ◽

Vapor Deposition Process ◽

Helicon Wave Plasma

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Epitaxial Growth of GaN by Helicon Wave Plasma Assisted Metal Organic Chemical Vapor Deposition Process

Japanese Journal of Applied Physics ◽

10.1143/jjap.37.6946 ◽

1998 ◽

Vol 37 (Part 1, No. 12B) ◽

pp. 6946-6950 ◽

Author(s):

Ki-Sung Kim ◽

Seon-Hyo Kim

Keyword(s):

Chemical Vapor Deposition ◽

Epitaxial Growth ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Organic Chemical ◽

Helicon Wave ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Adhesion improvement of cubic BN:C film synthesized by a helicon wave plasma chemical vapor deposition process

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.582273 ◽

2000 ◽

Vol 18 (3) ◽

pp. 900-906 ◽

Author(s):

Kyoung-Bo Kim ◽

Seon-Hyo Kim

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Helicon Wave ◽

Vapor Deposition Process ◽

Helicon Wave Plasma

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Characteristics of ferroelectric Sr0.7Bi2.1Ta2.0O9 thin films grown by liquid delivery metal organic chemical vapor deposition process

Thin Solid Films ◽

10.1016/j.tsf.2005.07.115 ◽

2005 ◽

Vol 492 (1-2) ◽

pp. 140-145 ◽

Author(s):

Byong-Ho Kim ◽

Dong-Kyun Kang

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

Vapor Deposition Process

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Aluminum Precipitation to the Surface of Carbon Fiber with the Metal Organic Chemical Vapor Deposition Process

Journal of the Japan Institute of Metals and Materials ◽

10.2320/jinstmet1952.53.2_237 ◽

1989 ◽

Vol 53 (2) ◽

pp. 237-240 ◽

Author(s):

Masuji Kumazawa ◽

Hiroyuki Umehara ◽

Takakazu Suzuki

Keyword(s):

Chemical Vapor Deposition ◽

Carbon Fiber ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

Vapor Deposition Process

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Silicon epitaxial growth on GaAs using a rapid thermal chemical vapor deposition process

Applied Physics Letters ◽

10.1063/1.105383 ◽

1991 ◽

Vol 59 (6) ◽

pp. 656-658 ◽

Author(s):

Y. I. Nissim ◽

J. Sapriel ◽

Y. Gao ◽

C. d’Anterroches ◽

J. L. Regolini ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Epitaxial Growth ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Thermal Chemical Vapor Deposition ◽

Vapor Deposition Process

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Investigation on AlN epitaxial growth and related etching phenomenon at high temperature using high temperature chemical vapor deposition process

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2011.09.018 ◽

2011 ◽

Vol 335 (1) ◽

pp. 17-24 ◽

Author(s):

A. Claudel ◽

E. Blanquet ◽

D. Chaussende ◽

R. Boichot ◽

B. Doisneau ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

High Temperature ◽

Epitaxial Growth ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Vapor Deposition Process

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A new metal-organic chemical vapor deposition process for selective copper metallization

Materials Science and Engineering B ◽

10.1016/0921-5107(93)90085-2 ◽

1993 ◽

Vol 17 (1-3) ◽

pp. 87-92 ◽

Author(s):

J.A.T. Norman ◽

B.A. Muratore ◽

P.N. Dyer ◽

D.A. Roberts ◽

A.K. Hochberg ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Copper Metallization ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

Vapor Deposition Process

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ANALYSIS OF HEAT AND MASS TRANSFER DURING MULTI-WAFER LOW PRESSURE CHEMICAL VAPOR DEPOSITION PROCESS

Proceeding of International Heat Transfer Conference 11 ◽

10.1615/ihtc11.240 ◽

1998 ◽

Author(s):

K.S. Park ◽

M. Choi

Keyword(s):

Mass Transfer ◽

Chemical Vapor Deposition ◽

Heat And Mass Transfer ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Low Pressure ◽

Chemical Vapor Deposition Process ◽

Pressure Chemical ◽

Vapor Deposition Process

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An analysis of the effect of the solid layer for the modified chemical vapor deposition process

Wärme- und Stoffübertragung ◽

10.1007/bf01541187 ◽

1993 ◽

Vol 28 (4) ◽

pp. 169-176 ◽

Author(s):

Y. T. Lin ◽

M. Choi ◽

R. Greif

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Chemical Vapor Deposition Process ◽

Solid Layer ◽

Vapor Deposition Process

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The Modified Chemical Vapor Deposition Process in a Concentric Annulus: An Extension for Focused High-Rate Deposition

Aerosol Science and Technology ◽

10.1080/02786828808959211 ◽

1988 ◽

Vol 9 (3) ◽

pp. 237-249 ◽

Author(s):

M. Fiebig ◽

M. Hilgenstock ◽

H.-A. Riemann

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

High Rate ◽

Chemical Vapor Deposition Process ◽

Concentric Annulus ◽

Vapor Deposition Process

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