A new metal-organic chemical vapor deposition process for selective copper metallization

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Copper Metallization ◽

Organic Chemical ◽

Metal Organic ◽

Vapor Deposition Process

Characteristics of ferroelectric Sr0.7Bi2.1Ta2.0O9 thin films grown by liquid delivery metal organic chemical vapor deposition process

Thin Solid Films ◽

10.1016/j.tsf.2005.07.115 ◽

2005 ◽

Vol 492 (1-2) ◽

pp. 140-145 ◽

Cited By ~ 1

Author(s):

Byong-Ho Kim ◽

Dong-Kyun Kang

Keyword(s):

Thin Films ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Organic Chemical ◽

Metal Organic ◽

Vapor Deposition Process

Aluminum Precipitation to the Surface of Carbon Fiber with the Metal Organic Chemical Vapor Deposition Process

Journal of the Japan Institute of Metals and Materials ◽

10.2320/jinstmet1952.53.2_237 ◽

1989 ◽

Vol 53 (2) ◽

pp. 237-240 ◽

Cited By ~ 1

Author(s):

Masuji Kumazawa ◽

Hiroyuki Umehara ◽

Takakazu Suzuki

Keyword(s):

Carbon Fiber ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Organic Chemical ◽

Metal Organic ◽

Vapor Deposition Process

Encapsulating the electroluminescent phosphor micro-particles using a pulsed metal-organic chemical vapor deposition process in a fluidized bed

Thin Solid Films ◽

10.1016/s0040-6090(02)00104-9 ◽

2002 ◽

Vol 409 (1) ◽

pp. 58-65 ◽

Cited By ~ 9

Author(s):

Jimin Kim ◽

Gui Young Han ◽

Chan-Hwa Chung

Keyword(s):

Fluidized Bed ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Organic Chemical ◽

Micro Particles ◽

Metal Organic ◽

Half-sandwich cobalt complexes in the metal-organic chemical vapor deposition process

Thin Solid Films ◽

10.1016/j.tsf.2015.01.052 ◽

2015 ◽

Vol 578 ◽

pp. 180-184 ◽

Cited By ~ 5

Author(s):

Colin Georgi ◽

Marko Hapke ◽

Indre Thiel ◽

Alexander Hildebrandt ◽

Thomas Waechtler ◽

...

Keyword(s):

Vapor Deposition ◽

Chemical Vapor ◽

Cobalt Complexes ◽

Deposition Process ◽

Organic Chemical ◽

Metal Organic ◽

Half Sandwich

Epitaxial Growth of GaN by Helicon Wave Plasma Assisted Metal Organic Chemical Vapor Deposition Process

Japanese Journal of Applied Physics ◽

10.1143/jjap.37.6946 ◽

1998 ◽

Vol 37 (Part 1, No. 12B) ◽

pp. 6946-6950 ◽

Cited By ~ 2

Author(s):

Ki-Sung Kim ◽

Seon-Hyo Kim

Keyword(s):

Epitaxial Growth ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Organic Chemical ◽

Helicon Wave ◽

Metal Organic ◽

Formation of Erbia-Yttria double layer fabricated by metal organic chemical vapor deposition process with changing oxygen flow rates

Thin Solid Films ◽

10.1016/j.tsf.2019.137455 ◽

2019 ◽

Vol 689 ◽

pp. 137455 ◽

Cited By ~ 1

Author(s):

Seungwon Lee ◽

Kenji Matsuda ◽

Masaki Tanaka ◽

Taiki Tsuchiya ◽

Katsuhiko Nishimura ◽

...

Keyword(s):

Double Layer ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Organic Chemical ◽

Flow Rates ◽

Metal Organic ◽

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

Low temperature metal-organic chemical vapor deposition of tungsten nitride as diffusion barrier for copper metallization

10.1116/1.590703 ◽

1999 ◽

Vol 17 (3) ◽

pp. 1101 ◽

Cited By ~ 41

Author(s):

Jean E. Kelsey ◽

Cindy Goldberg ◽

Guillermo Nuesca ◽

Gregory Peterson ◽

Alain E. Kaloyeros ◽

...

Keyword(s):

Low Temperature ◽

Diffusion Barrier ◽

Vapor Deposition ◽

Chemical Vapor ◽

Copper Metallization ◽

Organic Chemical ◽

Tungsten Nitride ◽

Metal Organic ◽

In SituSpectrum Observation of Ga Deposition Process during GaAs Metal-Organic Chemical Vapor Deposition Using Surface Photo-Absorption

Japanese Journal of Applied Physics ◽

10.1143/jjap.32.l1380 ◽

1993 ◽

Vol 32 (Part 2, No. 10A) ◽

pp. L1380-L1382 ◽

Cited By ~ 3

Author(s):

Yoshiharu Yamauchi ◽

Kunihiko Uwai ◽

Naoki Kobayashi

Keyword(s):

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Organic Chemical ◽

Metal Organic ◽

Colloidal lithography and Metal-Organic Chemical Vapor Deposition process integration to fabricate ZnO nanohole arrays

Thin Solid Films ◽

10.1016/j.tsf.2010.04.005 ◽

2010 ◽

Vol 518 (16) ◽

pp. 4484-4488 ◽

Cited By ~ 4

Author(s):

Maria Elena Fragalà ◽

Cristina Satriano ◽

Yana Aleeva ◽

Graziella Malandrino

Keyword(s):

Vapor Deposition ◽

Process Integration ◽

Chemical Vapor ◽

Deposition Process ◽

Organic Chemical ◽

Colloidal Lithography ◽

Nanohole Arrays ◽

Metal Organic ◽

Praseodymium Silicate as a High-kDielectric Candidate: An Insight into the Pr2O3-Film/Si-Substrate Interface Fabricated Through a Metal-Organic Chemical Vapor Deposition Process

Advanced Functional Materials ◽

10.1002/adfm.200300346 ◽

2005 ◽

Vol 15 (5) ◽

pp. 838-845 ◽

Cited By ~ 27

Author(s):

R. Lo Nigro ◽

R. G. Toro ◽

G. Malandrino ◽

G. G. Condorelli ◽

V. Raineri ◽

...

Keyword(s):

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Organic Chemical ◽

Si Substrate ◽

Substrate Interface ◽

Metal Organic ◽

Insight Into