Electrical characterization of sol-gel derived PZT thin films

This paper presents the growth and characterization of PZT thin films by using the sol-gel technology. In this paper, we study the influences of annealing process and different substrates on the orientation and crystalline quality of PZT thin films. The crystallographic structures are tested by using X-ray diffractometer (XRD), and the residual stresses of PZT thin films are obtained by calculation from a derived stress-strain equation in XRD analysis. Moreover, surface morphology and microstructure of the films are investigated by using AFM and SEM, and the polarization hysteresis of PZT thin films is measured by using a Sawyer Tower circuit. The results show that PZT thin films prepared by using the sol-gel method have good properties and can be used for developing PZT-based micro and nano devices.

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Electrical characterization of sol–gel-derived (1−x)NBT–xNTa (0.05

Ceramics International ◽

10.1016/j.ceramint.2012.12.095 ◽

2013 ◽

Vol 39 (5) ◽

pp. 5991-5995 ◽

Cited By ~ 5

Author(s):

Špela Kunej ◽

Asja Veber ◽

Danilo Suvorov

Keyword(s):

Thin Films ◽

Sol Gel ◽

Electrical Characterization

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Characterization of Piezoelectric Property of Sol-Gel PZT Thin Films and Its Improvement by Poling

IEEJ Transactions on Sensors and Micromachines ◽

10.1541/ieejsmas.124.124 ◽

2004 ◽

Vol 124 (4) ◽

pp. 124-128 ◽

Cited By ~ 4

Author(s):

Kaoru Yamashita ◽

Masanori Okuyama

Keyword(s):

Thin Films ◽

Piezoelectric Property ◽

Sol Gel ◽

Pzt Thin Films

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Sol–gel synthesis and electrical characterization of Bi3.25La0.75Ti3O12 thin films

Materials Research Bulletin ◽

10.1016/j.materresbull.2012.04.033 ◽

2012 ◽

Vol 47 (11) ◽

pp. 3819-3824 ◽

Cited By ~ 8

Author(s):

Aiying Wu ◽

M. Rosa Soares ◽

Isabel M. Miranda Salvado ◽

Paula M. Vilarinho

Keyword(s):

Thin Films ◽

Sol Gel ◽

Electrical Characterization ◽

Sol Gel Synthesis

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Fabrication and Electrical Characterization of Epitaxially Grown (Ba,Sr)TiO3 Thin Films Prepared by Sol-Gel Method

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.320.81 ◽

2006 ◽

Vol 320 ◽

pp. 81-84 ◽

Cited By ~ 8

Author(s):

Tadasu Hosokura ◽

Akira Ando ◽

Yukio Sakabe

Keyword(s):

Thin Films ◽

Sol Gel ◽

Electrical Characterization ◽

Columnar Structure ◽

Grown Film ◽

Gel Method ◽

Sol Gel Method ◽

Transmission Electron ◽

Columnar Grain

Epitaxially grown (Ba,Sr)TiO3 thin films were prepared on platinum-coated silicon substrate by sol-gel method using a (Ba,Sr)TiO3 sol derived from Ba(CH3COO)2, Sr(CH3COO)2 and Ti(O-i-C3H7)4. The morphology of the films was found to depend on the annealing condition. A columnar structure was obtained for (Ba,Sr)TiO3 thin film by annealing at 800 °C and a columnar grain was found to be single crystal by transmission electron microscope (TEM). The columnar grown film exhibits a preferred (111) orientation that follows the (111) orientation of Pt substrate. Measurement of the C-V in MFM was configured in order to demonstrate good dielectric properties. Obtained films showed high voltage tunability.

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Fabrication and Testing of a Micromirror Device Actuated by PZT Thin Films

Journal of Microelectronics and Electronic Packaging ◽

10.4071/1551-4897-3.4.209 ◽

2006 ◽

Vol 3 (4) ◽

pp. 209-215

Author(s):

Z.M. Xiao ◽

B.J. Chen ◽

H. Fan

Keyword(s):

Thin Films ◽

Plasma Etching ◽

Sol Gel ◽

Two Dimensional ◽

Release Process ◽

Scanning Angle ◽

Pzt Thin Films ◽

Resonance Frequencies ◽

Bimorph Beam

The paper describes the fabrication and characterization of two-dimensional resonant micromirror device actuated by sol-gel deposited PZT thin films. The actuation principle is based on the bimorph beam structure, which consists of an oxide layer and a piezoelectric PZT layer. The two-dimensional scanning performance can be achieved by applying AC voltages with phase shifts at resonance to the actuating beams. The devices are fabricated through thin film depositions, lithography, dry plasma etching and the ICP release process. For a micromirror structure with a 300μm ×300μm mirror plate, the first four resonance frequencies are measured to be in the range of 10–30 kHz. To investigate the vibration modes, the deflections on different locations of the mirror plate are measured. The two dimensional scanning angle is determined to be in one direction and 11° at 23.4 kHz in the perpendicular direction.

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