Characterization of Piezoelectric Property of Sol-Gel PZT Thin Films and Its Improvement by Poling

This paper presents the growth and characterization of PZT thin films by using the sol-gel technology. In this paper, we study the influences of annealing process and different substrates on the orientation and crystalline quality of PZT thin films. The crystallographic structures are tested by using X-ray diffractometer (XRD), and the residual stresses of PZT thin films are obtained by calculation from a derived stress-strain equation in XRD analysis. Moreover, surface morphology and microstructure of the films are investigated by using AFM and SEM, and the polarization hysteresis of PZT thin films is measured by using a Sawyer Tower circuit. The results show that PZT thin films prepared by using the sol-gel method have good properties and can be used for developing PZT-based micro and nano devices.

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Fabrication and Testing of a Micromirror Device Actuated by PZT Thin Films

Journal of Microelectronics and Electronic Packaging ◽

10.4071/1551-4897-3.4.209 ◽

2006 ◽

Vol 3 (4) ◽

pp. 209-215

Author(s):

Z.M. Xiao ◽

B.J. Chen ◽

H. Fan

Keyword(s):

Thin Films ◽

Plasma Etching ◽

Sol Gel ◽

Two Dimensional ◽

Release Process ◽

Scanning Angle ◽

Pzt Thin Films ◽

Resonance Frequencies ◽

Bimorph Beam

The paper describes the fabrication and characterization of two-dimensional resonant micromirror device actuated by sol-gel deposited PZT thin films. The actuation principle is based on the bimorph beam structure, which consists of an oxide layer and a piezoelectric PZT layer. The two-dimensional scanning performance can be achieved by applying AC voltages with phase shifts at resonance to the actuating beams. The devices are fabricated through thin film depositions, lithography, dry plasma etching and the ICP release process. For a micromirror structure with a 300μm ×300μm mirror plate, the first four resonance frequencies are measured to be in the range of 10–30 kHz. To investigate the vibration modes, the deflections on different locations of the mirror plate are measured. The two dimensional scanning angle is determined to be in one direction and 11° at 23.4 kHz in the perpendicular direction.

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Preparation and Characterization of Sol-Gel Derived PZT Thin Films for Micro Actuators

IEEJ Transactions on Sensors and Micromachines ◽

10.1541/ieejsmas.119.254 ◽

1999 ◽

Vol 119 (4) ◽

pp. 254-259 ◽

Cited By ~ 3

Author(s):

Zhan-jie Wang ◽

Ryutaro Maeda ◽

Kikuchi Kaoru

Keyword(s):

Thin Films ◽

Sol Gel ◽

Pzt Thin Films ◽

Micro Actuators

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Optical characterization of sol–gel deposited PZT thin films by spectroscopic ellipsometry and reflectometry in near-UV and visible regions

Applied Surface Science ◽

10.1016/j.apsusc.2004.10.089 ◽

2005 ◽

Vol 244 (1-4) ◽

pp. 338-342 ◽

Cited By ~ 10

Author(s):

Daniel Franta ◽

Ivan Ohlídal ◽

Jan Mistrík ◽

Tomuo Yamaguchi ◽

Gu Jin Hu ◽

...

Keyword(s):

Thin Films ◽

Spectroscopic Ellipsometry ◽

Sol Gel ◽

Optical Characterization ◽

Pzt Thin Films

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Characterization of PZT Thin Films by Sol-Gel Method in Application of Resonant Sensor

2008 2nd International Conference on Bioinformatics and Biomedical Engineering ◽

10.1109/icbbe.2008.53 ◽

2008 ◽

Author(s):

J. Z. Tsai ◽

C. J. Chen ◽

C. W. Hsiao ◽

D. T Hsieh ◽

Y. M. Hsin

Keyword(s):

Thin Films ◽

Sol Gel ◽

Pzt Thin Films ◽

Gel Method ◽

Sol Gel Method ◽

Resonant Sensor

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Electrical characterization of sol-gel derived PZT thin films

ISAF '92: Proceedings of the Eighth IEEE International Symposium on Applications of Ferroelectrics ◽

10.1109/isaf.1992.300595 ◽

2003 ◽

Cited By ~ 11

Author(s):

K.R. Bellur ◽

H.N. Al-Shareef ◽

S.H. Rou ◽

K.D. Gifford ◽

O. Auciello ◽

...

Keyword(s):

Thin Films ◽

Sol Gel ◽

Electrical Characterization ◽

Pzt Thin Films

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Characterization of PZT thin films prepared by a modified sol–gel method

Journal of the European Ceramic Society ◽

10.1016/s0955-2219(98)00442-7 ◽

1999 ◽

Vol 19 (6-7) ◽

pp. 1387-1389 ◽

Cited By ~ 5

Author(s):

Bernd Matthes ◽

Gerhard Tomandl ◽

Günter Werner

Keyword(s):

Thin Films ◽

Sol Gel ◽

Pzt Thin Films ◽

Gel Method ◽

Sol Gel Method

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Preparation and Characterization of Laser Ablation Derived PZT Thin Films for Micro Actuators

IEEJ Transactions on Sensors and Micromachines ◽

10.1541/ieejsmas.121.124 ◽

2001 ◽

Vol 121 (3) ◽

pp. 124-128

Author(s):

Zhan-Jie Wang ◽

Wen-Mei Lin ◽

Ryutaro Maeda

Keyword(s):

Thin Films ◽

Laser Ablation ◽

Pzt Thin Films ◽

Micro Actuators

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Preparation and Electrical Characteristics of (100), (111), and Randomly Oriented PZT Thin Films

MRS Proceedings ◽

10.1557/proc-361-445 ◽

1994 ◽

Vol 361 ◽

Author(s):

Chang Jung Kim ◽

Dae Sung Yoon ◽

Joon Sung Lee ◽

Chaun Gi Choi ◽

Won Jong Lee ◽

...

Keyword(s):

Thin Films ◽

Sol Gel ◽

Hysteresis Loops ◽

Test System ◽

Electrical Characteristics ◽

Pzt Thin Films ◽

Pole Figures ◽

Current Voltage ◽

Current Voltage Characteristics ◽

Drying Conditions

ABSTRACTThe (100), (111) and randomly oriented PZT thin films were fabricated on Pt/Ti/Coming 7059 glass using sol-gel method. The thin films having different orientation were fabricated by different drying conditions for pyrolysis. The preferred orientations of the PZT thin films were observed using XRD, rocking curves, and pole figures. The microstructures were investigated using SEM. The hysteresis loops and capacitance-voltage characteristics of the films were investigated using a standardized ferroelectric test system. The dielectric constant and current-voltage characteristics of the films were investigated using an impedance analyzer and pA meter, respectively. The films oriented in a particular direction showed superior electrical characteristics to the randomly oriented films.

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