Reliability optimization for wide bandgap devices: Recent developments in high-spatial resolution thermal imaging of GaN devices

AbstractPreviously, imaging and analysis with cathodoluminescence (CL) detectors required using high accelerating voltages. Utilization of lower accelerating voltage for microanalysis has the advantages of reduced beam-specimen interaction volume, and thus better spatial resolution, as well as reduction in electron beam induced damage. This article will highlight recent developments in field emission gun–scanning electron microscope technology that have allowed acquisition of high spatial resolution CL images at very low accelerating voltages. The advantages of low kV CL imaging will be shown using examples of a geological specimen (shale) and a specimen of an industrial grade diamond.

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Recent Developments in Detectors for High Spatial Resolution Positron CT

IEEE Transactions on Nuclear Science ◽

10.1109/tns.1984.4333291 ◽

1984 ◽

Vol 31 (1) ◽

pp. 424-428 ◽

Cited By ~ 13

Author(s):

Y. Yamashita ◽

H. Uchida ◽

T. Yamashita ◽

T. Hayashi

Keyword(s):

Spatial Resolution ◽

High Spatial Resolution ◽

Recent Developments ◽

Positron Ct

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High spatial resolution AEM observations of yttrium segregation in chromia scales grown on Co-45%Cr

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100144103 ◽

1986 ◽

Vol 44 ◽

pp. 518-519

Author(s):

K. Przybylski ◽

A. J. Garratt-Reed ◽

G. J. Yurek

Keyword(s):

Spatial Resolution ◽

Outer Surface ◽

Maximum Concentration ◽

High Spatial Resolution ◽

Reactive Elements ◽

Chromia Scales

The addition of so-called “reactive” elements such as yttrium to alloys is known to enhance the protective nature of Cr2O3 or Al2O3 scales. However, the mechanism by which this enhancement is achieved remains unclear. An A.E.M. study has been performed of scales grown at 1000°C for 25 hr. in pure O2 on Co-45%Cr implanted at 70 keV with 2x1016 atoms/cm2 of yttrium. In the unoxidized alloys it was calculated that the maximum concentration of Y was 13.9 wt% at a depth of about 17 nm. SIMS results showed that in the scale the yttrium remained near the outer surface.

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Integration of Core-Edge Spectroscopy Methods for the Study of Polymers

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s042482010016323x ◽

1996 ◽

Vol 54 ◽

pp. 154-155

Author(s):

E. G. Rightor

Keyword(s):

Excited State ◽

Polymer Blends ◽

Gas Phase ◽

Spatial Resolution ◽

High Spatial Resolution ◽

Electronic States ◽

Core Electron ◽

Bulk Solids ◽

Development Application

Core edge spectroscopy methods are versatile tools for investigating a wide variety of materials. They can be used to probe the electronic states of materials in bulk solids, on surfaces, or in the gas phase. This family of methods involves promoting an inner shell (core) electron to an excited state and recording either the primary excitation or secondary decay of the excited state. The techniques are complimentary and have different strengths and limitations for studying challenging aspects of materials. The need to identify components in polymers or polymer blends at high spatial resolution has driven development, application, and integration of results from several of these methods.

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