The effects of plasma treatment on the thermal stability of HfAlOx thin films

Author(s):  
Kow-Ming Chang ◽  
Bwo-Ning Chen ◽  
Shih-Ming Huang
2008 ◽  
Vol 254 (19) ◽  
pp. 6116-6118 ◽  
Author(s):  
Kow-Ming Chang ◽  
Bwo-Ning Chen ◽  
Shih-Ming Huang

2021 ◽  
Vol 46 (5) ◽  
pp. 4137-4153
Author(s):  
Neha Verma ◽  
Rob Delhez ◽  
Niek M. van der Pers ◽  
Frans D. Tichelaar ◽  
Amarante J. Böttger

1998 ◽  
Vol 16 (2) ◽  
pp. 477-481 ◽  
Author(s):  
Yong Tae Kim ◽  
Chul Soon Kwon ◽  
Dong Joon Kim ◽  
Jong-Wan Park ◽  
Chang Woo Lee

1999 ◽  
Vol 86 (11) ◽  
pp. 6276-6281 ◽  
Author(s):  
J. V. Anguita ◽  
S. R. P. Silva ◽  
A. P. Burden ◽  
B. J. Sealy ◽  
S. Haq ◽  
...  

Metals ◽  
2018 ◽  
Vol 8 (7) ◽  
pp. 514 ◽  
Author(s):  
Yung-I Chen ◽  
Zhi-Ting Zheng ◽  
Jia-Wei Jhang

Sign in / Sign up

Export Citation Format

Share Document