The effects of plasma treatment on the thermal stability of HfAlOx thin films
2008 ◽
Vol 254
(19)
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pp. 6116-6118
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2021 ◽
Vol 46
(5)
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pp. 4137-4153
2006 ◽
2006 ◽
Vol 16
(1)
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pp. 54-58
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Keyword(s):
1998 ◽
Vol 16
(2)
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pp. 477-481
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2001 ◽
Vol 141
(1)
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pp. 55-61
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