A low power MEMS-ASIC silicon resonant accelerometor with sub-µg bias instability and ±30g full-scale

2016 ◽  
Author(s):  
Jian Zhao ◽  
Guoming Xia ◽  
Yang Zhao ◽  
Anping Qiu ◽  
Yan Su
Keyword(s):  
Low Power ◽  
Full Scale ◽  
Power Mems ◽  
Bias Instability

Research of Low-Power MEMS-based Micro hotplates Gas Sensor: A Review

2021 ◽  
pp. 1-1
Author(s):  
Zhenyu Yuan ◽  
Fan Yang ◽  
Fanli Meng ◽  
Kaiyuan Zuo ◽  
Jin Li
Keyword(s):  
Low Power ◽  
Gas Sensor ◽  
Power Mems

A Wafer-level Vacuum Packaged MEMS Disk Resonator Gyroscope with 0.42/h Bias Instability within 300/s Full Scale

2021 ◽  
pp. 1-1
Author(s):  
Hao Wang ◽  
Haiyang Quan ◽  
Jinqiu Zhou ◽  
Long Zhang ◽  
Jianbing Xie ◽  
...  
Keyword(s):  
Full Scale ◽  
Wafer Level ◽  
Disk Resonator ◽  
Bias Instability

scholarly journals Ultra-Low Power MEMS Gas Sensor Technology and Application

Proceedings ◽  
2019 ◽  
Vol 14 (1) ◽  
pp. 9
Author(s):  
Yoshinori Nishiue
Keyword(s):  
Low Power ◽  
Gas Sensor ◽  
Sensor Technology ◽  
Ultra Low Power ◽  
Power Mems ◽  
Semiconductor Type

The semiconductor type sensor developed by New Cosmos is a very unique sensor depending on its principle and structure.[...]

Sign in / Sign up

Export Citation Format

Share Document