Characterization of Modal Frequencies and Orientation of Axisymmetric Resonators in Coriolis Vibratory Gyroscopes

This paper presents the characterization of the modal frequencies and the modal orientation of the axisymmetric resonators in Coriolis vibratory gyroscopes based on the approaches of the frequency sweep and the ring down. The modal frequencies and the orientation of the stiffness axis are the key parameters for the mechanical correction of the stiffness imperfections. The frequency sweep method utilizes the zero and the poles in the magnitude-frequency responses of the two-dimensional transfer function to extract the modal orientation information within the frequency domain. The ring down method makes use of the peak and the valley values of the beat signals at the readout electrodes to obtain the modal orientation and the coefficient of the nonlinear stiffness directly within the time domain. The proposed approaches were verified via a silicon ring resonator designed for gyroscopic sensing and the modal information from the experiments exhibited a good agreement between the methods of the frequency sweep and the ring down.

A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes

With the development of the designing and manufacturing level for micro-electromechanical system (MEMS) gyroscopes, the control circuit system has become a key point to determine their internal performance. Nevertheless, the phase delay of electronic components may result in some serious hazards. This study described a real-time circuit phase delay correction system for MEMS vibratory gyroscopes. A detailed theoretical analysis was provided to clarify the influence of circuit phase delay on the in-phase and quadrature (IQ) coupling characteristics and the zero-rate output (ZRO) utilizing a force-to-rebalance (FTR) closed-loop detection and quadrature correction system. By deducing the relationship between the amplitude-frequency, the phase-frequency of the MEMS gyroscope, and the phase relationship of the whole control loop, a real-time correction system was proposed to automatically adjust the phase reference value of the phase-locked loop (PLL) and thus compensate for the real-time circuit phase delay. The experimental results showed that the correction system can accurately measure and compensate the circuit phase delay in real time. Furthermore, the unwanted IQ coupling can be eliminated and the ZRO was decreased by 755% to 0.095°/s. This correction system realized a small angle random walk of 0.978°/√h and a low bias instability of 9.458°/h together with a scale factor nonlinearity of 255 ppm at room temperature. The thermal drift of the ZRO was reduced to 0.0034°/s/°C at a temperature range from −20 to 70 °C.

A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes

With the development of designing and manufacturing level for micro-electromechanical system (MEMS) gyroscopes, the control circuit system becomes a key point to determine their internal performances. Nevertheless, phase delay of electron components may result in some serious hazards. This paper describes a real-time circuit phase delay correction system for MEMS vibratory gyroscopes. A detailed theoretical analysis is provided to clarify the influences of circuit phase delay on the in-phase and quadrature (IQ) coupling characteristics and zero rate output (ZRO) utilizing force-to-rebalance (FTR) closed-loop detection and quadrature correction system. By deducing the relationship between amplitude-frequency, phase-frequency of MEMS gyroscope and the phase relationship of the whole control loop, a real-time correction system is proposed to automatically adjust the phase reference value of phase-locked loop (PLL) and thus compensate for the real-time circuit phase delay. The experimental results show that the correction system can accurately measure and compensate the circuit phase delay in real time. Furthermore, the unwanted IQ coupling can be eliminated and the ZRO is decreased by 755% to 0.095°/s. This correction system realizes a small angle random walk of 0.978°/√h, and a low bias instability of 9.458°/h together with a scale factor nonlinearity of 255 ppm at room temperature. Besides, the thermal drift of ZRO is reduced to 0.0034°/s/°C at a temperature range from -20°C to 70°C.

Eigenmode operation of piezoelectric resonant gyroscopes

The theory of eigenmode operation of Coriolis vibratory gyroscopes and its implementation on a thin-film piezoelectric gyroscope is presented. It is shown analytically that the modal alignment of resonant gyroscopes can be achieved by applying a rotation transformation to the actuation and sensing directions regardless of the transduction mechanism. This technique is especially suitable for mode matching of piezoelectric gyroscopes, obviating the need for narrow capacitive gaps or DC polarization voltages. It can also be applied for mode matching of devices that require sophisticated electrode arrangements for modal alignment, such as electrostatic pitch and roll gyroscopes with slanted electrodes utilized for out-of-plane quadrature cancellation. Gyroscopic operation of a 3.15 MHz AlN-on-Si annulus resonator that utilizes a pair of high-Q degenerate in-plane vibration modes is demonstrated. Modal alignment of the piezoelectric gyroscope is accomplished through virtual alignment of the excitation and readout electrodes to the natural direction of vibration mode shapes in the presence of fabrication nonidealities. Controlled displacement feedback of the gyroscope drive signal is implemented to achieve frequency matching of the two gyroscopic modes. The piezoelectric gyroscope shows a mode-matched operation bandwidth of ~250 Hz, which is one of the largest open-loop bandwidth values reported for a mode-matched MEMS gyroscope, a small motional resistance of ~1300 Ω owing to efficient piezoelectric transduction, and a scale factor of 1.57 nA/°/s for operation at atmospheric pressure, which greatly relaxes packaging requirements. Eigenmode operation results in an ~35 dB reduction in the quadrature error at the resonance frequency. The measured angle random walk of the device is 0.86°/√h with a bias instability of 125°/h limited by the excess noise of the discrete electronics.

Significance of the Asymmetry of the Haltere: A Microscale Vibratory Gyroscope

Nature has evolved a beautiful design for small-scale vibratory gyroscopes in the form of halteres located in the metathorax region of the dipteran flies that detect body rotations based on the Coriolis principle. The specific design of the haltere is in contrast to the existing MEMS vibratory gyroscope, where the elastic beams supporting the proof mass are typically designed with symmetric cross-sections so that there is a mode matching between the actuation and sensing vibrations. The mode matching provides high sensitivity and low bandwidth. Hence, the objective of the manuscript is to understand the mechanical significance of the haltere’s asymmetry. In this study, the distributed Coriolis force and the corresponding bending stress by incorporating the actual mass variations along the haltere length are estimated. In addition, it is hypothesied that sensilla sense the rate of rotation based on the differential strain (difference between the final strain (strain due to the inertial and Coriolis forces) and the reference strain (strain due to inertial force)). This differential strain always occurs either on the dorsal or ventral surface of the haltere and at a distance away from the base, where the campaniform sensilla are located. This study brings out one specific feature—the asymmetric geometry of the haltere structure—that is not found in current vibratory gyroscope designs. This finding will inspire new designs of MEMS gyroscopes that have elegance and simplicity of the haltere along with the desired performance.

Dynamics of MEMS-Based Angular Rate Sensors Excited via External Electrostatic Forces

This paper investigates the dynamic behavior of rotating MEMS-based vibratory gyroscopes which employs a thin ring as the vibrating flexible element. The mathematical model for the MEMS ring structure as well as a model for the nonlinear electrostatic excitation forces are formulated. Galerkin’s procedure is employed to reduce the equations of motion to a set of ordinary differential equations. Understanding the effects of nonlinear actuator dynamics is considered important for characterizing the dynamic behavior of such devices. A suitable theoretical model to generate nonlinear electrostatic force that acts on the MEMS ring structure is formulated. Dynamic responses in the driving and the sensing directions are examined via time responses, phase diagram, and Poincare’ map plots when the input angular motion and the nonlinear electrostatic force are considered simultaneously. The analysis is envisaged to aid fabrication of this class of devices as well as for providing design improvements in MEMS Ring-based Gyroscopes.