Cu passivation with self-assembled monolayers for direct metal bonding in 3D integration

2017 ◽  
Author(s):  
Maria Lykova ◽  
Iuliana Panchenko ◽  
Marion Geidel ◽  
Johanna Reif ◽  
Juergen M. Wolf ◽  
...  
Keyword(s):  
Self Assembled Monolayers ◽  
3D Integration ◽  
Metal Bonding ◽  
Assembled Monolayers ◽  
Self Assembled ◽  
Cu Passivation

Enhancing direct metal bonding with self-assembled monolayers

2006 ◽  
Vol 504 (1-2) ◽  
pp. 367-370 ◽  
Author(s):  
L.C. Chin ◽  
X.F. Ang ◽  
J. Wei ◽  
Z. Chen ◽  
C.C. Wong
Keyword(s):  
Self Assembled Monolayers ◽  
Metal Bonding ◽  
Assembled Monolayers ◽  
Self Assembled

The effect of sulfur–metal bonding on the structure of self-assembled monolayers

2000 ◽  
Vol 2 (15) ◽  
pp. 3359-3362 ◽  
Author(s):  
M. Zharnikov ◽  
S. Frey ◽  
H. Rong ◽  
Y.-J. Yang ◽  
K. Heister ◽  
...  
Keyword(s):  
Self Assembled Monolayers ◽  
Metal Bonding ◽  
Assembled Monolayers ◽  
Self Assembled

Electrochemical behavior of self-assembled monolayers based on functionalized oligothiophenes

1998 ◽  
Vol 95 (6) ◽  
pp. 1339-1342 ◽  
Author(s):  
R. Michalitsch ◽  
A. El Kassmi ◽  
P. Lang ◽  
A. Yassar ◽  
F. Garnier
Keyword(s):  
Electrochemical Behavior ◽  
Self Assembled Monolayers ◽  
Assembled Monolayers ◽  
Self Assembled

Imaging of patterned self-assembled monolayers by scanning photoelectron microscopy

2003 ◽  
Vol 104 ◽  
pp. 459-462 ◽  
Author(s):  
R. Klauser ◽  
M. Zharnikov ◽  
I.-H. Hong ◽  
S.-C. Wang ◽  
A. Gölzhäuser ◽  
...  
Keyword(s):  
Self Assembled Monolayers ◽  
Assembled Monolayers ◽  
Scanning Photoelectron Microscopy ◽  
Self Assembled

Self-assembled Monolayers Preparation and Characterization of BiFeO3 Thin Films

2009 ◽  
Vol 25 (1) ◽  
pp. 83-86 ◽  
Author(s):  
Guo-Qiang TAN ◽  
Hai-Yang BO ◽  
Hong-Yan MIAO ◽  
Ao XIA ◽  
Zhong-Liang HE
Keyword(s):  
Thin Films ◽  
Self Assembled Monolayers ◽  
Assembled Monolayers ◽  
Self Assembled
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