Nano-Crystalline Silicon-Based Bottom Gate Thin-Film Transistor Grown by LTPECVD With Hydrogen-Free He Diluted ${\hbox{SiH}} _{4}$
2013 ◽
Vol 9
(7)
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pp. 536-544
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2010 ◽
Vol 43
(19)
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pp. 195102
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2003 ◽
Vol 24
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pp. 574-576
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Vol 29
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pp. 1309-1311
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2018 ◽
Vol 65
(7)
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pp. 2820-2826
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