Improvement of crystal quality of cubic GaN film using AlN/GaN ordered alloy on GaAs[100] by plasma assisted molecular beam epitaxy

2003 ◽  
Author(s):  
R. Kimura ◽  
A. Shigemori ◽  
J. Shike ◽  
M. Ohuchi ◽  
K. Ishida ◽  
...  
Keyword(s):  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
Crystal Quality ◽  
Cubic Gan ◽  
Gan Film

Improvement of cubic GaN film crystal quality by use of an AlN/GaN ordered alloy on GaAs (100) by plasma assisted molecular beam epitaxy

2003 ◽  
Vol 251 (1-4) ◽  
pp. 455-459 ◽  
Author(s):  
Ryuhei Kimura ◽  
Atsushi Shigemori ◽  
Junichi Shike ◽  
Koichi Ishida ◽  
Kiyoshi Takahashi
Keyword(s):  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
Crystal Quality ◽  
Cubic Gan ◽  
Gan Film

Thermal stability of cubic GaN film grown by molecular-beam epitaxy on GaAs(001)

2002 ◽  
Vol 299 (1) ◽  
pp. 79-84 ◽  
Author(s):  
M Xu ◽  
C.X Liu ◽  
H.F Liu ◽  
G.M Luo ◽  
X.M Chen ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
Cubic Gan ◽  
Gan Film ◽  
Thermal Stability Of

Improvement of Crystal Quality of RF-Plasma-Assisted Molecular Beam Epitaxy Grown Ga-Polarity GaN by High-Temperature Grown AlN Multiple Intermediate Layers

2000 ◽  
Vol 39 (Part 2, No. 4B) ◽  
pp. L330-L333 ◽  
Author(s):  
Akihiko Kikuchi ◽  
Takayuki Yamada ◽  
Shinichi Nakamura ◽  
Kazuhide Kusakabe ◽  
Daisuke Sugihara ◽  
...  
Keyword(s):  
High Temperature ◽  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
Crystal Quality ◽  
Rf Plasma ◽  
Intermediate Layers

Aspects of Crystal Quality of Si (100) Films Grown by Molecular Beam Epitaxy

1991 ◽  
Vol 220 ◽  
Author(s):  
W. -X. Ni ◽  
A. Henry ◽  
J. O. Ekberg ◽  
G. V. Hansson
Keyword(s):  
Molecular Beam Epitaxy ◽  
Mechanical Stress ◽  
Chemical Etching ◽  
Molecular Beam ◽  
Crystal Quality ◽  
Radiant Heating ◽  
Resistive Heating ◽  
Good Crystal Quality ◽  
Resistively Heated

ABSTRACTSilicon layers grown by molecular beam epitaxy, using both direct resistive heating and indirect radiant heating of the substrate, have been evaluated by photoluminescence measurements, diode I-V characterization, and chemical etching tests. The results show that large densities of defects could be introduced when resistively heated substrates were experiencing thermo-mechanical stress. Films with good crystal quality were grown using a carefully designed radiant type heater.

scholarly journals Влияние степени нитридизации сапфира и обогащения алюминием зародышевого слоя на структурные свойства слоев AlN

2018 ◽  
Vol 52 (6) ◽  
pp. 643
Author(s):  
Т.В. Малин ◽  
Д.С. Милахин ◽  
В.Г. Мансуров ◽  
Ю.Г. Галицын ◽  
А.С. Кожухов ◽  
...  
Keyword(s):  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
Crystal Quality ◽  
Sapphire Substrates

AbstractThe effect of atomic aluminum deposited onto sapphire substrates with different nitridation levels on the quality of AlN layers grown by ammonia molecular-beam epitaxy is investigated. The nitridation of sapphire with the formation of ~1 monolayer of AlN is shown to ensure the growth of layers with a smoother surface and better crystal quality than in the case of the formation of a nitrided AlN layer with a thickness of ~2 monolayers. It is demonstrated that the change in the duration of exposure of nitrided substrates to the atomic aluminum flux does not significantly affect the parameters of subsequent AlN layers.

The growth parameter influence on the crystal quality of InAsSb grown on GaAs by molecular beam epitaxy

2007 ◽  
Vol 308 (2) ◽  
pp. 406-411 ◽  
Author(s):  
Hanchao Gao ◽  
Wenxin Wang ◽  
Zhongwei Jiang ◽  
Linsheng Liu ◽  
Junming Zhou ◽  
...  
Keyword(s):  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
Growth Parameter ◽  
Crystal Quality ◽  
Parameter Influence

scholarly journals Cubic GaN Film Growth Using AlN/GaN Ordered Alloy by RF Plasma-Assisted Molecular Beam Epitaxy

2003 ◽  
Vol 0 (1) ◽  
pp. 170-174
Author(s):  
A. Shigemori ◽  
J. Shike ◽  
K. Takahashi ◽  
K. Ishida ◽  
R. Kimura
Keyword(s):  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
Film Growth ◽  
Rf Plasma ◽  
Cubic Gan ◽  
Gan Film
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