Low noise vacuum MEMS closed-loop accelerometer using sixth-order multi-feedback loops and local resonator sigma delta modulator

Author(s):  
Fang Chen ◽  
Weizheng Yuan ◽  
Honglong Chang ◽  
Ioannis Zeimpekis ◽  
Michael Kraft
2011 ◽  
Vol 483 ◽  
pp. 508-512
Author(s):  
Hai Xi Lu ◽  
Yong Ping Xu ◽  
Shou Rong Wang

A CMOS integrated interface circuit for micro-machined gyroscope containing a novel front-end and 6th-order Sigma-delta modulator is presented in this paper. To reduce the noise coming from the sensor and circuit, the front-end is accomplished by a switched-capacitor architecture, which constructed by a high-gain fully-differential amplifier and improved by chopper-stabilization technique, and work under a designed charging and sampling logic scheme. A cascade 6th-order Sigma-Delta modulator is designed to get high resolution, reduce quantized error and suppress the instability brought by high-order modulator. With the cascade structure and 16-bit resolution 32 OSR, the modulator outputs 3-bits digital stream. The whole circuit is designed with AMS technique and 3.3V power consumption. The simulation result presents that the interface circuit performs a appointed under a low-noise design specification in signal band, and the SNR of the circuit achieves remarkable value of 106dB.


2010 ◽  
Vol 45 (6) ◽  
pp. 1122-1136 ◽  
Author(s):  
Cho-Ying Lu ◽  
Jose Fabian Silva-Rivas ◽  
Praveena Kode ◽  
Jose Silva-Martinez ◽  
Sebastian Hoyos

2017 ◽  
Vol 14 (15) ◽  
pp. 20170700-20170700 ◽  
Author(s):  
Xiangyu Li ◽  
Weiping Chen ◽  
Liang Yin ◽  
Qiang Fu ◽  
Xiaowei Liu

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