Low noise vacuum MEMS closed-loop accelerometer using sixth-order multi-feedback loops and local resonator sigma delta modulator
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2014 ◽
Vol 61
(3)
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pp. 957-957
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2010 ◽
Vol 45
(6)
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pp. 1122-1136
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2009 ◽
Vol 56
(12)
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pp. 2533-2543
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2017 ◽
Vol 14
(15)
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pp. 20170700-20170700
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