High sensitivity capacitive humidity sensor with a novel polyimide design fabricated by MEMS technology

2009 ◽  
Author(s):  
Ji-Hong Kim ◽  
Sung-Min Hong ◽  
Jang-Sub Lee ◽  
Byung-Moo Moon ◽  
Kunnyun Kim
Keyword(s):  
Humidity Sensor ◽  
High Sensitivity ◽  
Mems Technology ◽  
Capacitive Humidity Sensor

scholarly journals Humidity Sensors with Shielding Electrode Under Interdigitated Electrode

Sensors ◽  
2019 ◽  
Vol 19 (3) ◽  
pp. 659 ◽  
Author(s):  
Hong Liu ◽  
Qi Wang ◽  
Wenjie Sheng ◽  
Xubo Wang ◽  
Kaidi Zhang ◽  
...  
Keyword(s):  
Humidity Sensor ◽  
High Sensitivity ◽  
Fast Response ◽  
Capacitive Sensors ◽  
Humidity Sensors ◽  
Interdigitated Electrode ◽  
Response Recovery ◽  
Chip Fabrication ◽  
Good Agreement ◽  
Capacitive Humidity Sensor

Recently, humidity sensors have been investigated extensively due to their broad applications in chip fabrication, health care, agriculture, amongst others. We propose a capacitive humidity sensor with a shielding electrode under the interdigitated electrode (SIDE) based on polyimide (PI). Thanks to the shielding electrode, this humidity sensor combines the high sensitivity of parallel plate capacitive sensors and the fast response of interdigitated electrode capacitive sensors. We use COMSOL Multiphysics to design and optimize the SIDE structure. The experimental data show very good agreement with the simulation. The sensitivity of the SIDE sensor is 0.0063% ± 0.0002% RH. Its response/recovery time is 20 s/22 s. The maximum capacitance drift under different relative humidity is 1.28% RH.

scholarly journals Tin Disulfide-Coated Microfiber for Humidity Sensing with Fast Response and High Sensitivity

Crystals ◽  
2021 ◽  
Vol 11 (6) ◽  
pp. 648
Author(s):  
Aijie Liang ◽  
Jingyuan Ming ◽  
Wenguo Zhu ◽  
Heyuan Guan ◽  
Xinyang Han ◽  
...  
Keyword(s):  
Humidity Sensor ◽  
Small Diameter ◽  
High Sensitivity ◽  
Large Change ◽  
Small Variation ◽  
Response Speed ◽  
Fast Response ◽  
Tin Disulfide ◽  
Recovery Times ◽  
Response And Recovery

Breath monitoring is significant in assessing human body conditions, such as cardiac and pulmonary symptoms. Optical fiber-based sensors have attracted much attention since they are immune to electromagnetic radiation, thus are safe for patients. Here, a microfiber (MF) humidity sensor is fabricated by coating tin disulfide (SnS2) nanosheets onto the surface of MF. The small diameter (~8 μm) and the long length (~5 mm) of the MF promise strong interaction between guiding light and SnS2. Thus, a small variation in the relative humidity (RH) will lead to a large change in optical transmitted power. A high RH sensitivity of 0.57 dB/%RH is therefore achieved. The response and recovery times are estimated to be 0.08 and 0.28 s, respectively. The high sensitivity and fast response speed enable our SnS2-MF sensor to monitor human breath in real time.

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