Modeling and optimization of a capacitive humidity sensor response in MEMS technology

2014 North African Workshop on Dielectic Materials for Photovoltaic Systems (NAWDMPV) ◽

10.1109/nawdmpv.2014.6997606 ◽

2014 ◽

Author(s):

N. Benmoussa ◽

A. Benichou ◽

N. Medjahdi ◽

K. Rahmoun

Keyword(s):

Humidity Sensor ◽

Sensor Response ◽

Modeling And Optimization ◽

Mems Technology ◽

Capacitive Humidity Sensor

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Modeling and Optimization of a Microscale Capacitive Humidity Sensor for HVAC Applications

IEEE Sensors Journal ◽

10.1109/jsen.2008.917479 ◽

2008 ◽

Vol 8 (4) ◽

pp. 333-340 ◽

Author(s):

Ashis Kumar Sen ◽

Jeff Darabi

Keyword(s):

Humidity Sensor ◽

Modeling And Optimization ◽

Capacitive Humidity Sensor

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High sensitivity capacitive humidity sensor with a novel polyimide design fabricated by MEMS technology

2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems ◽

10.1109/nems.2009.5068676 ◽

2009 ◽

Author(s):

Ji-Hong Kim ◽

Sung-Min Hong ◽

Jang-Sub Lee ◽

Byung-Moo Moon ◽

Kunnyun Kim

Keyword(s):

Humidity Sensor ◽

High Sensitivity ◽

Mems Technology ◽

Capacitive Humidity Sensor

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Modeling and optimization of a fast response capacitive humidity sensor

IEEE Sensors Journal ◽

10.1109/jsen.2006.874446 ◽

2006 ◽

Vol 6 (3) ◽

pp. 714-720 ◽

Author(s):

A. Tetelin ◽

C. Pellet

Keyword(s):

Humidity Sensor ◽

Fast Response ◽

Modeling And Optimization ◽

Capacitive Humidity Sensor

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High-performance capacitive humidity sensor with novel electrode and polyimide layer based on MEMS technology

Microsystem Technologies ◽

10.1007/s00542-010-1139-0 ◽

2010 ◽

Vol 16 (12) ◽

pp. 2017-2021 ◽

Author(s):

Ji-Hong Kim ◽

Sung-Min Hong ◽

Byung-Moo Moon ◽

Kunnyun Kim

Keyword(s):

High Performance ◽

Humidity Sensor ◽

Mems Technology ◽

Polyimide Layer ◽

Capacitive Humidity Sensor

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A high-and-rapid-response capacitive humidity sensor of nanoporous anodic alumina by one-step anodizing commercial 1050 aluminum alloy and its enhancement mechanism

Sensors and Actuators B Chemical ◽

10.1016/j.snb.2021.130156 ◽

2021 ◽

pp. 130156

Author(s):

C.K. Chung ◽

C.A. Ku ◽

Z.E. Wu

Keyword(s):

Aluminum Alloy ◽

Humidity Sensor ◽

Anodic Alumina ◽

Rapid Response ◽

Enhancement Mechanism ◽

Nanoporous Anodic Alumina ◽

One Step ◽

1050 Aluminum Alloy ◽

Capacitive Humidity Sensor

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Fully inkjet-printed BaTiO3 capacitive humidity sensor: microstructural engineering of the humidity sensing layer using bimodal ink

Ceramics International ◽

10.1016/j.ceramint.2021.05.191 ◽

2021 ◽

Author(s):

Frances Danielle M. Fernandez ◽

Murali Bissannagari ◽

Jihoon Kim

Keyword(s):

Humidity Sensor ◽

Humidity Sensing ◽

Capacitive Humidity Sensor

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Nano particle porous alumina based thin film parallel plate capacitive humidity sensor

10.1063/1.4872672 ◽

2014 ◽

Author(s):

Shailesh Kumar

Keyword(s):

Thin Film ◽

Parallel Plate ◽

Humidity Sensor ◽

Porous Alumina ◽

Nano Particle ◽

Capacitive Humidity Sensor

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Development of an Innovative Micro Capacitive Humidity Sensor With Double Polyimide Films and Interlacing Out-of-plane Electrodes Structure

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems ◽

10.1109/nems.2007.352125 ◽

2007 ◽

Author(s):

I-Yu Huang ◽

Yao-Yu Lee ◽

Chang-Yu Lin

Keyword(s):

Humidity Sensor ◽

Polyimide Films ◽

Out Of Plane ◽

Capacitive Humidity Sensor

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Fabrication of Nanostructured Metal Oxide Thin Film Capacitive Humidity Sensor

Metal and Metal Oxides for Energy and Electronics - Environmental Chemistry for a Sustainable World ◽

10.1007/978-3-030-53065-5_10 ◽

2020 ◽

pp. 355-374

Author(s):

Anwar Ulla Khan ◽

Lokesh Kumar ◽

Tarikul Islam ◽

Mohammad Ehtisham Khan

Keyword(s):

Thin Film ◽

Metal Oxide ◽

Humidity Sensor ◽

Oxide Thin Film ◽

Metal Oxide Thin Film ◽

Nanostructured Metal ◽

Capacitive Humidity Sensor

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Capacitive humidity sensor using a polyimide sensing film

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. ◽

10.1109/dtip.2003.1287041 ◽

2004 ◽

Author(s):

J. Laconte ◽

V. Wilmart ◽

J.-P. Raskin ◽

D. Flandre

Keyword(s):

Humidity Sensor ◽

Capacitive Humidity Sensor

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