Fabrication of sub-micrometer surface structures on sapphire substrate for GaN-based light-emitting diodes by metal contact printing method

Author(s):  
Yi-Ta Hsieh ◽  
Wei-Ru Chen ◽  
An-Ru Lin ◽  
Yung-Chun Lee ◽  
Hung-Yi Lin
Micromachines ◽  
2018 ◽  
Vol 9 (12) ◽  
pp. 622 ◽  
Author(s):  
Wen-Yang Hsu ◽  
Yuan-Chi Lian ◽  
Pei-Yu Wu ◽  
Wei-Min Yong ◽  
Jinn-Kong Sheu ◽  
...  

Micron-sized patterned sapphire substrates (PSS) are used to improve the performance of GaN-based light-emitting diodes (LEDs). However, the growth of GaN is initiated not only from the bottom c-plane but also from the sidewall of the micron-sized patterns. Therefore, the coalescence of these GaN crystals creates irregular voids. In this study, two kinds of nucleation layers (NL)—ex-situ AlN NL and in-situ GaN NL—were used, and the growth of sidewall GaN was successfully suppressed in both systems by modifying the micron-sized PSS surface.


Small ◽  
2015 ◽  
Vol 12 (2) ◽  
pp. 161-168 ◽  
Author(s):  
Young-Chul Leem ◽  
Jung Su Park ◽  
Joon Heon Kim ◽  
NoSoung Myoung ◽  
Sang-Youp Yim ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document