A complete analytical model for square diaphragm capacitive sensor with clamped edge
2015 ◽
Vol 22
(5)
◽
pp. 1143-1150
◽
Keyword(s):
1999 ◽
Vol 122
(1)
◽
pp. 102-107
◽
1997 ◽
Vol 48
(10)
◽
pp. 978-987
Keyword(s):
1990 ◽
Vol 137
(4)
◽
pp. 291
1988 ◽
Vol 49
(C8)
◽
pp. C8-911-C8-912
Keyword(s):
2018 ◽
Vol 138
(8)
◽
pp. 382-386