Analytical model for clamped edge circular diaphragm based on capacitive pressure sensing technique
2015 ◽
Vol 22
(5)
◽
pp. 1143-1150
◽
Keyword(s):
Keyword(s):
2016 ◽
Vol 2016
(HiTEC)
◽
pp. 000051-000055
◽
2014 ◽
Vol 21
(5)
◽
pp. 1073-1079
◽
1997 ◽
Vol 48
(10)
◽
pp. 978-987
Keyword(s):
1990 ◽
Vol 137
(4)
◽
pp. 291
1988 ◽
Vol 49
(C8)
◽
pp. C8-911-C8-912
Keyword(s):