The First-Priniple Simulation Study on the Specific Grain Boundary Resistivity in Copper Interconnects
1990 ◽
Vol 51
(C1)
◽
pp. C1-245-C1-250
2018 ◽
Vol 101
(7)
◽
pp. 3105-3117
◽
1997 ◽
Vol 143-147
◽
pp. 1673-1678
◽
2009 ◽
Vol 100
(4)
◽
pp. 550-555
◽
Keyword(s):
2011 ◽
Vol 50
(8S3)
◽
pp. 08LB09
◽