A two-dimensional simulation of a capacitively-coupled parallel-plate RF discharge using a hybrid fluid-Monte Carlo method
Keyword(s):
1990 ◽
Vol 48
(4)
◽
pp. 140-141
Keyword(s):
Keyword(s):
1995 ◽
Vol 78
(3-4)
◽
pp. 759-798
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2017 ◽
Vol 200
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pp. 225-233
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