Electron heating in rf capacitive discharges at atmospheric-to-subatmospheric pressures

Scientific Reports ◽

10.1038/s41598-018-27945-6 ◽

2018 ◽

Vol 8 (1) ◽

Author(s):

Sanghoo Park ◽

Wonho Choe ◽

Holak Kim

Keyword(s):

Electron Heating ◽

Capacitive Discharges

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Electron heating in multiple-frequency capacitive discharges

Plasma Physics and Controlled Fusion ◽

10.1088/0741-3335/48/12b/s22 ◽

2006 ◽

Vol 48 (12B) ◽

pp. B231-B237 ◽

Author(s):

P Chabert ◽

P Levif ◽

J-L Raimbault ◽

J-M Rax ◽

M M Turner ◽

...

Keyword(s):

Multiple Frequency ◽

Electron Heating ◽

Capacitive Discharges

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The influence of the relative phase between the driving voltages on electron heating in asymmetric dual frequency capacitive discharges

Plasma Sources Science and Technology ◽

10.1088/0963-0252/19/4/045001 ◽

2010 ◽

Vol 19 (4) ◽

pp. 045001 ◽

Author(s):

D Ziegler ◽

J Trieschmann ◽

T Mussenbrock ◽

R P Brinkmann ◽

J Schulze ◽

...

Keyword(s):

Relative Phase ◽

Dual Frequency ◽

Electron Heating ◽

Capacitive Discharges

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Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms

2014 IEEE 41st International Conference on Plasma Sciences (ICOPS) held with 2014 IEEE International Conference on High-Power Particle Beams (BEAMS) ◽

10.1109/plasma.2014.7012493 ◽

2014 ◽

Author(s):

J. Schulze ◽

E. Schuengel ◽

A. Derzsi ◽

I. Korolov ◽

Z. Donko

Keyword(s):

Electron Heating ◽

And Control ◽

Capacitive Discharges

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Electron heating mode transition induced by mixing radio frequency and ultrahigh frequency dual frequency powers in capacitive discharges

Physics of Plasmas ◽

10.1063/1.4952629 ◽

2016 ◽

Vol 23 (5) ◽

pp. 053514 ◽

Author(s):

B. B. Sahu ◽

Jeon G. Han

Keyword(s):

Radio Frequency ◽

Ultrahigh Frequency ◽

Mode Transition ◽

Dual Frequency ◽

Electron Heating ◽

Capacitive Discharges ◽

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Nonlinear Plasma Dynamics in Electron Heating of Asymmetric Capacitive Discharges with a Fluid Sheath Model

Chinese Physics Letters ◽

10.1088/0256-307x/28/7/075202 ◽

2011 ◽

Vol 28 (7) ◽

pp. 075202 ◽

Author(s):

Zhong-Ling Dai ◽

You-Nian Wang

Keyword(s):

Plasma Dynamics ◽

Electron Heating ◽

Nonlinear Plasma ◽

Capacitive Discharges

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Temporal structure of electron heating in asymmetric single-frequency and dual-frequency capacitive discharges

Physics of Plasmas ◽

10.1063/1.3076206 ◽

2009 ◽

Vol 16 (2) ◽

pp. 023503 ◽

Author(s):

D. Ziegler ◽

T. Mussenbrock ◽

R. P. Brinkmann

Keyword(s):

Temporal Structure ◽

Single Frequency ◽

Dual Frequency ◽

Electron Heating ◽

Capacitive Discharges

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Mechanism of Electron Heating in Radio Frequency Capacitive Discharges

IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science ◽

10.1109/plasma.2005.359234 ◽

2005 ◽

Author(s):

Alan Wu ◽

Michael Lieberman ◽

John Verboncoeur

Keyword(s):

Radio Frequency ◽

Electron Heating ◽

Capacitive Discharges

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Electron heating mechanisms in dual-frequency capacitive discharges

Plasma Sources Science and Technology ◽

10.1088/0963-0252/16/2/020 ◽

2007 ◽

Vol 16 (2) ◽

pp. 364-371 ◽

Author(s):

M M Turner ◽

P Chabert

Keyword(s):

Dual Frequency ◽

Electron Heating ◽

Capacitive Discharges

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Electron heating, mode transitions, and asymmetry effects in dusty single- and dual-frequency capacitive discharges

2014 IEEE 41st International Conference on Plasma Sciences (ICOPS) held with 2014 IEEE International Conference on High-Power Particle Beams (BEAMS) ◽

10.1109/plasma.2014.7012577 ◽

2014 ◽

Author(s):

E. Schungel ◽

J. Schulze ◽

S. Mohr ◽

S. Iwashita ◽

U. Czarnetzki

Keyword(s):

Dual Frequency ◽

Electron Heating ◽

Asymmetry Effects ◽

Mode Transitions ◽

Capacitive Discharges ◽

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Numerical Study of the Effect of Applied Voltage on Simultaneous Modes of Electron Heating in RF Capacitive Discharges

Lecture Notes in Electrical Engineering - Proceedings of the 2nd International Conference on Electronic Engineering and Renewable Energy Systems ◽

10.1007/978-981-15-6259-4_29 ◽

2020 ◽

pp. 285-291

Author(s):

Abdelhak Missaoui ◽

Morad Elkaouini ◽

Hassan Chatei

Keyword(s):

Applied Voltage ◽

Numerical Study ◽

Electron Heating ◽

Capacitive Discharges

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