Mechanism of Electron Heating in Radio Frequency Capacitive Discharges

2005 ◽  
Author(s):  
Alan Wu ◽  
Michael Lieberman ◽  
John Verboncoeur
Keyword(s):  
Radio Frequency ◽  
Electron Heating ◽  
Capacitive Discharges

Electron heating in multiple-frequency capacitive discharges

2006 ◽  
Vol 48 (12B) ◽  
pp. B231-B237 ◽  
Author(s):  
P Chabert ◽  
P Levif ◽  
J-L Raimbault ◽  
J-M Rax ◽  
M M Turner ◽  
...  
Keyword(s):  
Multiple Frequency ◽  
Electron Heating ◽  
Capacitive Discharges

The influence of the relative phase between the driving voltages on electron heating in asymmetric dual frequency capacitive discharges

2010 ◽  
Vol 19 (4) ◽  
pp. 045001 ◽  
Author(s):  
D Ziegler ◽  
J Trieschmann ◽  
T Mussenbrock ◽  
R P Brinkmann ◽  
J Schulze ◽  
...  
Keyword(s):  
Relative Phase ◽  
Dual Frequency ◽  
Electron Heating ◽  
Capacitive Discharges

Radio-Frequency Capacitive Discharges

2017 ◽  
Author(s):  
Yuri P. Raizer ◽  
Mikhail N. Shneider ◽  
Nikolai A. Yatsenko
Keyword(s):  
Radio Frequency ◽  
Capacitive Discharges
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