ScienceGate
Advanced Search
Author Search
Journal Finder
Blog
Sign in / Sign up
ScienceGate
Search
Author Search
Journal Finder
Blog
Sign in / Sign up
Two-dimensional modeling of pulsed inductively coupled plasmas with and without a substrate bias
IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference (Cat. No.01CH37255)
◽
10.1109/ppps.2001.961252
◽
2002
◽
Author(s):
P. Subramonium
◽
M.J. Kushner
Keyword(s):
Substrate Bias
◽
Two Dimensional
◽
Inductively Coupled Plasmas
◽
Inductively Coupled
◽
Dimensional Modeling
◽
Coupled Plasmas
Download Full-text
Related Documents
Cited By
References
Two-dimensional modeling of long-term transients in inductively coupled plasmas using moderate computational parallelism. II. Ar/Cl2 pulsed plasmas
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
◽
10.1116/1.1434965
◽
2002
◽
Vol 20
(2)
◽
pp. 325-334
◽
Cited By ~ 34
Author(s):
Pramod Subramonium
◽
Mark J. Kushner
Keyword(s):
Two Dimensional
◽
Inductively Coupled Plasmas
◽
Pulsed Plasmas
◽
Inductively Coupled
◽
Dimensional Modeling
◽
Coupled Plasmas
Download Full-text
Two-dimensional modeling of long-term transients in inductively coupled plasmas using moderate computational parallelism. I. Ar pulsed plasmas
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
◽
10.1116/1.1434964
◽
2002
◽
Vol 20
(2)
◽
pp. 313-324
◽
Cited By ~ 37
Author(s):
Pramod Subramonium
◽
Mark J. Kushner
Keyword(s):
Two Dimensional
◽
Inductively Coupled Plasmas
◽
Pulsed Plasmas
◽
Inductively Coupled
◽
Dimensional Modeling
◽
Coupled Plasmas
Download Full-text
Kinetic two-dimensional modeling of inductively coupled plasmas based on a hybrid kinetic approach
IEEE Transactions on Plasma Science
◽
10.1109/27.799806
◽
1999
◽
Vol 27
(5)
◽
pp. 1297-1309
◽
Cited By ~ 18
Author(s):
U. Kortshagen
◽
B.G. Heil
Keyword(s):
Kinetic Approach
◽
Two Dimensional
◽
Inductively Coupled Plasmas
◽
Inductively Coupled
◽
Dimensional Modeling
◽
Coupled Plasmas
Download Full-text
Pulsed inductively coupled plasmas as a method to recoup uniformity: Three-dimensional modeling study
Applied Physics Letters
◽
10.1063/1.1776617
◽
2004
◽
Vol 85
(5)
◽
pp. 721-723
◽
Cited By ~ 6
Author(s):
Pramod Subramonium
◽
Mark J. Kushner
Keyword(s):
Three Dimensional
◽
Inductively Coupled Plasmas
◽
Inductively Coupled
◽
Three Dimensional Modeling
◽
Dimensional Modeling
◽
Coupled Plasmas
◽
Modeling Study
Download Full-text
Diagnostics and two-dimensional simulation of low-frequency inductively coupled plasmas with neutral gas heating and electron heat fluxes
Journal of Applied Physics
◽
10.1063/1.1510598
◽
2002
◽
Vol 92
(9)
◽
pp. 4935-4946
◽
Cited By ~ 27
Author(s):
K. N. Ostrikov
◽
I. B. Denysenko
◽
E. L. Tsakadze
◽
S. Xu
◽
R. G. Storer
Keyword(s):
Low Frequency
◽
Heat Fluxes
◽
Two Dimensional
◽
Inductively Coupled Plasmas
◽
Inductively Coupled
◽
Neutral Gas
◽
Electron Heat
◽
Gas Heating
◽
Dimensional Simulation
◽
Coupled Plasmas
Download Full-text
Two-dimensional ion flux distributions in inductively coupled plasmas: Effect of adding electronegative gases to Ar
Journal of Applied Physics
◽
10.1063/1.1517733
◽
2002
◽
Vol 92
(11)
◽
pp. 6444-6450
◽
Cited By ~ 5
Author(s):
Tae Won Kim
◽
Eray S. Aydil
Keyword(s):
Ion Flux
◽
Two Dimensional
◽
Inductively Coupled Plasmas
◽
Inductively Coupled
◽
Coupled Plasmas
Download Full-text
Extraction of negative ions from pulsed electronegative inductively coupled plasmas having a radio-frequency substrate bias
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
◽
10.1116/1.1690251
◽
2004
◽
Vol 22
(3)
◽
pp. 534
◽
Cited By ~ 17
Author(s):
Pramod Subramonium
◽
Mark J. Kushner
Keyword(s):
Radio Frequency
◽
Negative Ions
◽
Substrate Bias
◽
Inductively Coupled Plasmas
◽
Inductively Coupled
◽
Coupled Plasmas
Download Full-text
Experimental and theoretical study of two-dimensional ion flux uniformity at the wafer plane in inductively coupled plasmas
IEEE Transactions on Plasma Science
◽
10.1109/tps.2003.815243
◽
2003
◽
Vol 31
(4)
◽
pp. 614-627
◽
Cited By ~ 5
Author(s):
Tae Won Kim
◽
E.S. Aydil
Keyword(s):
Theoretical Study
◽
Ion Flux
◽
Two Dimensional
◽
Inductively Coupled Plasmas
◽
Inductively Coupled
◽
Coupled Plasmas
Download Full-text
Erratum: Power Matching to Pulsed Inductively Coupled Plasmas [J. Appl. Phys. 127, 133302 (2020)]
Journal of Applied Physics
◽
10.1063/5.0023888
◽
2020
◽
Vol 128
(8)
◽
pp. 089901
Author(s):
Chenhui Qu
◽
Steven J. Lanham
◽
Steven C. Shannon
◽
Sang Ki Nam
◽
Mark J. Kushner
Keyword(s):
Inductively Coupled Plasmas
◽
Inductively Coupled
◽
Power Matching
◽
Coupled Plasmas
Download Full-text
Etching characteristics of ZnO thin films in chlorine-containing inductively coupled plasmas
Microelectronic Engineering
◽
10.1016/j.mee.2005.09.007
◽
2006
◽
Vol 83
(2)
◽
pp. 328-335
◽
Cited By ~ 39
Author(s):
S.W. Na
◽
M.H. Shin
◽
Y.M. Chung
◽
J.G. Han
◽
S.H. Jeung
◽
...
Keyword(s):
Thin Films
◽
Zno Thin Films
◽
Inductively Coupled Plasmas
◽
Inductively Coupled
◽
Coupled Plasmas
Download Full-text
Sign in / Sign up
Close
Export Citation Format
Close
Share Document
Close