Hole trapping effect on methodology for DC and AC negative bias temperature instability measurements in PMOS transistors

Author(s):  
V. Huard ◽  
M. Denais
2017 ◽  
Vol 897 ◽  
pp. 533-536
Author(s):  
Cheng Tyng Yen ◽  
Hsiang Ting Hung ◽  
Chien Chung Hung ◽  
Lurng Shehng Lee ◽  
Chwan Ying Lee ◽  
...  

The NBTI characteristics of SiC MOSFET were studied by the subthreshold swing. The subthreshold swing was found to be very sensitive to the starting bias of transfer curve. The increase of subthreshold swing for MOSFET with poor oxide reached 400% when the starting bias was-15V. The increase of subthreshold swing was caused by enhanced hole trapping which could be explained by the mechanism of positively charged interface states assisted hole trapping. The increase of subthreshold swing for MOSFET with improved gate oxide was reduced to about 40% when the starting bias was-20V and the value approached saturation for starting biases more negative than-10V, which can also be explained by the proposed mechanism. The increase of subthreshold swing for MOSFET with improved oxide was not sensitive to the temperature. The increase of subthreshold swing at 175°C was only 5%~7% higher than that at room temperature.


2009 ◽  
Vol 86 (7-9) ◽  
pp. 1876-1882 ◽  
Author(s):  
T. Grasser ◽  
B. Kaczer ◽  
W. Goes ◽  
Th. Aichinger ◽  
Ph. Hehenberger ◽  
...  

2016 ◽  
Vol 108 (1) ◽  
pp. 012106 ◽  
Author(s):  
Cheng-Tyng Yen ◽  
Chien-Chung Hung ◽  
Hsiang-Ting Hung ◽  
Chwan-Ying Lee ◽  
Lurng-Shehng Lee ◽  
...  

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