Failure mechanism study for high resistance gate contact in dram devices for 2008 IRPS
2019 ◽
Vol 21
(4)
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pp. 940-951
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Keyword(s):
Keyword(s):
Keyword(s):
2015 ◽
Vol 55
(9-10)
◽
pp. 2067-2071
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Keyword(s):
1981 ◽