A trench isolated thick SOI process as platform for various electrical and optical integrated devices

Author(s):  
R. Lerner ◽  
D. Gaebler ◽  
K. Schottmann ◽  
S. Hering
Keyword(s):  
Author(s):  
Daniel L. Callahan ◽  
H. M. Phillips ◽  
R. Sauerbrey

Excimer laser irradiation has been used to interferometrically ablate submicron line patterns on to Kapton polyimide. Such patterned material may exhibit highly anisotropic conduction as was predicted from previous studies showing enhanced conductivity from uniformly ablated material. We are currently exploiting this phenomenon to create integrated devices using conventional polymers as both dielectrics and conductors. Extensive scanning electron microscopy (SEM) and limited transmission electron microscopy (TEM) have been conducted in order to characterize the morphology of such patterned nanostructures as a function of processing conditions.The ablation technique employed produces an interference pattern on the polymer surface of period equal to half that of a diffraction grating period, independent of the laser wavelength. In these experiments, a 328 nm grating has been used to produce line patterns of 164 nm line-spacings as shown in Figures 1 and 2. A 200 Å Au coating has been used to both prevent charging and, perhaps more importantly, enhance contrast.


1988 ◽  
Vol 24 (19) ◽  
pp. 1232 ◽  
Author(s):  
R.S. Linton ◽  
I.H. White ◽  
J.E. Carroll ◽  
J. Singh ◽  
M.J. Adams ◽  
...  

2021 ◽  
pp. 2010388
Author(s):  
Hatice Ceren Ates ◽  
Anna Brunauer ◽  
Felix Stetten ◽  
Gerald A. Urban ◽  
Firat Güder ◽  
...  

Nanomaterials ◽  
2021 ◽  
Vol 11 (6) ◽  
pp. 1485
Author(s):  
Wei Wang ◽  
Ruikang Zhao ◽  
Shilong Chang ◽  
Jing Li ◽  
Yan Shi ◽  
...  

In this paper, one spin-selected vortex metalens composed of silicon nanobricks is designed and numerically investigated at the mid-infrared band, which can produce vortex beams with different topological charges and achieve different spin lights simultaneously. Another type of spin-independent vortex metalens is also designed, which can focus the vortex beams with the same topological charge at the same position for different spin lights, respectively. Both of the two vortex metalenses can achieve high-efficiency focusing for different spin lights. In addition, the spin-to-orbital angular momentum conversion through the vortex metalens is also discussed in detail. Our work facilitates the establishment of high-efficiency spin-related integrated devices, which is significant for the development of vortex optics and spin optics.


2014 ◽  
Author(s):  
Marco Fiorentino ◽  
Chin-Hui Chen ◽  
Géza Kurczveil ◽  
Di Liang ◽  
Zhen Peng ◽  
...  

2004 ◽  
Vol 76 (13) ◽  
pp. 3740-3748 ◽  
Author(s):  
Rohit Pal ◽  
Ming Yang ◽  
Brian N. Johnson ◽  
David T. Burke ◽  
Mark A. Burns

Sign in / Sign up

Export Citation Format

Share Document