Characterization of parylene-assisted wafer bonding: long-term stability and influence of process chemicals
2020 ◽
Vol 107
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pp. 110203
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Keyword(s):
Keyword(s):
2017 ◽
Vol 55
(2)
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pp. 1147-1159
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1983 ◽
Vol 17
(2-3)
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pp. 135-144
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2011 ◽
Vol 208
(6)
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pp. 1301-1307
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1999 ◽
Vol 88
(1)
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pp. 79-88
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Keyword(s):
2004 ◽
Vol 93
(4)
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pp. 1005-1018
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