scholarly journals Atomic force microscopy developments for probing space charge at sub-micrometer scale in thin dielectric films

2016 ◽  
Vol 23 (2) ◽  
pp. 713-720 ◽  
Author(s):  
C. Villeneuve-Faure ◽  
L. Boudou ◽  
K. Makasheva ◽  
G. Teyssedre
2007 ◽  
Vol 7 (2) ◽  
pp. 418-423 ◽  
Author(s):  
Rong Jin ◽  
Xiaoxiao He ◽  
Kemin Wang ◽  
Liu Yang ◽  
Huimin Li ◽  
...  

In this paper, different sequences of single-strand DNA modified on Si substrate were studied taking advantages of the high resolution of atomic force microscopy (AFM) and signal enhancement of gold nanoparticles. Two sequences of single-strand DNA, as a model, were immobilized on Si substrate and hybridized with their sequence-complementary DNA molecules modified respectively with two sizes of gold nanoparticles. The surface of Si substrate was characterized through detecting the size and coverage of gold nanoparticles by AFM. Results demonstrated that different sizes of gold nanoparticles represented different sequences of DNA immobilized on the substrate. Density and distribution of DNA on Si substrate can be investigated by AFM imaging using gold nanoparticles as topographic markers. Compared to other sensitive methods such as fluorescence energy transfer, X-ray photoelectron, and radiolabeling experiments, this approach is advantageous in terms of high spatial resolution in sub-micrometer scale. This new method will be beneficial in the characterization of DNA immobilized on chip surfaces.


2009 ◽  
Vol 24 (9) ◽  
pp. 2960-2964 ◽  
Author(s):  
Gheorghe Stan ◽  
Sean W. King ◽  
Robert F. Cook

Correlated force and contact resonance versus displacement responses have been resolved using load-dependent contact-resonance atomic force microscopy (AFM) to determine the elastic modulus of low-k dielectric thin films. The measurements consisted of recording simultaneously both the deflection and resonance frequency shift of an AFM cantilever probe as the probe was gradually brought in and out of contact. As the applied forces were restricted to the range of adhesive forces, low-k dielectric films of elastic modulus varying from GPa to hundreds of GPa were measurable in this investigation. Over this elastic modulus range, the reliability of load-dependent contact-resonance AFM measurements was confirmed by comparing these results with those from picosecond laser acoustic measurements.


2018 ◽  
Vol 124 (10) ◽  
Author(s):  
E. Cruz-Valeriano ◽  
D. E. Guzmán-Caballero ◽  
T. Escamilla-Díaz ◽  
A. Gutierrez-Peralta ◽  
Susana Meraz Davila ◽  
...  

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