New actuation method for push-pull electrostatic mems comb drive

2003 ◽  
Vol 50 (6) ◽  
pp. 1337-1339 ◽  
Author(s):  
Tao Zhao ◽  
Y.C. Liang
Keyword(s):  
Comb Drive ◽  
Electrostatic Mems ◽  
Actuation Method

scholarly journals Finite Element Analysis of the Vertical Levitation Force in an Electrostatic MEMS Comb Drive Actuator

2013 ◽  
Vol 472 ◽  
pp. 012002 ◽  
Author(s):  
J Wooldridge ◽  
J Blackburn ◽  
A Muniz-Piniella ◽  
M Stewart ◽  
T A V Shean ◽  
...  
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Levitation Force ◽  
Comb Drive ◽  
Element Analysis ◽  
Electrostatic Mems

Stabilization of the Side Pull-In Bifurcation of an Electrostatic Comb Drive Actuator Model Using Oscillatory Open-Loop Control

2011 ◽  
Author(s):  
I. P. M. Wickramasinghe ◽  
Jordan M. Berg
Keyword(s):  
Open Loop ◽  
Control Voltage ◽  
Stable Range ◽  
Open Loop Control ◽  
Comb Drive ◽  
Loop Control ◽  
Average Value ◽  
Electrostatic Mems ◽  
Operating Region ◽  
Stable Operating

The stable operating region of an electrostatic comb drive actuator in constant-gap mode is limited by a subcritical pitch-fork bifurcation known as side pull-in. We show that oscillatory open-loop control can forestall side pull-in and substantially extend the stable operating region. To our knowledge, this is the first demonstration of control of side pull-in without additional lateral actuators. To our knowledge it is also the first application of open-loop oscillatory control to an electrostatic MEMS model using a single control voltage. Simulations show the stable range of travel increased by over 60%, with an associated oscillation of less than 2%. Although feedback control has been used to stabilize a related bifurcation in electrostatic gap-closing actuators, we show that these approaches are unlikely to succeed for side pull-in. Finally, we present and validate formulas relating parameters of the oscillatory input to the average value and oscillations of the resulting displacement.

An Equivalent Circuit Model for Vertical Comb Drive MEMS Optical Scanner Controlled by Pulse Width Modulation

2012 ◽  
Vol 132 (1) ◽  
pp. 1-9 ◽  
Author(s):  
Satoshi Maruyama ◽  
Muneki Nakada ◽  
Makoto Mita ◽  
Takuya Takahashi ◽  
Hiroyuki Fujita ◽  
...  
Keyword(s):  
Equivalent Circuit ◽  
Pulse Width ◽  
Pulse Width Modulation ◽  
Equivalent Circuit Model ◽  
Circuit Model ◽  
Comb Drive ◽  
Optical Scanner

AC Polarization for Charge-Drift Elimination in Resonant Electrostatic MEMS and Oscillators

2011 ◽  
Vol 20 (2) ◽  
pp. 355-364 ◽  
Author(s):  
Gaurav Bahl ◽  
James C. Salvia ◽  
Renata Melamud ◽  
Bongsang Kim ◽  
Roger T. Howe ◽  
...  
Keyword(s):  
Electrostatic Mems

scholarly journals Capacitive Charge-based Self-Sensing for Resonant Electrostatic MEMS mirrors

2020 ◽  
Vol 53 (2) ◽  
pp. 8553-8558
Author(s):  
Richard Schroedter ◽  
Han Woong Yoo ◽  
David Brunner ◽  
Georg Schitter
Keyword(s):  
Electrostatic Mems

scholarly journals Precise phase control of resonant MOEMS mirrors by comb-drive current feedback

Mechatronics ◽  
2020 ◽  
Vol 71 ◽  
pp. 102420
Author(s):  
David Brunner ◽  
Han Woong Yoo ◽  
Georg Schitter
Keyword(s):  
Phase Control ◽  
Comb Drive ◽  
Current Feedback ◽  
Drive Current

Analysis of the “Push–pull” Capacitance Bridge Circuit for Comb-Drive Micro-electro-mechanical Oscillators

2015 ◽  
Vol 183 (3-4) ◽  
pp. 313-319 ◽  
Author(s):  
P. Zheng ◽  
W. G. Jiang ◽  
C. S. Barquist ◽  
Y. Lee ◽  
H. B. Chan
Keyword(s):  
Bridge Circuit ◽  
Comb Drive ◽  
Capacitance Bridge ◽  
Mechanical Oscillators

Parametrically Excited Electrostatic MEMS Cantilever Beam With Flexible Support

2016 ◽  
Vol 139 (2) ◽  
Author(s):  
Mark Pallay ◽  
Shahrzad Towfighian
Keyword(s):  
Cantilever Beam ◽  
Large Amplitude ◽  
Chaotic Behavior ◽  
Signal To Noise Ratio ◽  
Mass Sensors ◽  
Flexible Support ◽  
Sensing Applications ◽  
Electrostatic Mems ◽  
Fringe Fields ◽  
Steady State Amplitude

Parametric resonators that show large amplitude of vibration are highly desired for sensing applications. In this paper, a microelectromechanical system (MEMS) parametric resonator with a flexible support that uses electrostatic fringe fields to achieve resonance is introduced. The resonator shows a 50% increase in amplitude and a 50% decrease in threshold voltage compared with a fixed support cantilever model. The use of electrostatic fringe fields eliminates the risk of pull-in and allows for high amplitudes of vibration. We studied the effect of decreasing boundary stiffness on steady-state amplitude and found that below a threshold chaotic behavior can occur, which was verified by the information dimension of 0.59 and Poincaré maps. Hence, to achieve a large amplitude parametric resonator, the boundary stiffness should be decreased but should not go below a threshold when the chaotic response will appear. The resonator described in this paper uses a crab-leg spring attached to a cantilever beam to allow for both translation and rotation at the support. The presented study is useful in the design of mass sensors using parametric resonance (PR) to achieve large amplitude and signal-to-noise ratio.

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