scholarly journals Finite Element Analysis of the Vertical Levitation Force in an Electrostatic MEMS Comb Drive Actuator

2013 ◽  
Vol 472 ◽  
pp. 012002 ◽  
Author(s):  
J Wooldridge ◽  
J Blackburn ◽  
A Muniz-Piniella ◽  
M Stewart ◽  
T A V Shean ◽  
...  
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Levitation Force ◽  
Comb Drive ◽  
Element Analysis ◽  
Electrostatic Mems

Modeling and Alleviating Instability in a MEMS Vertical Comb Drive Using a Progressive Linkage

2005 ◽  
Author(s):  
Jessica R. Bronson ◽  
Gloria J. Wiens ◽  
James J. Allen
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Parallel Plate ◽  
Fill Factor ◽  
Electrostatic Model ◽  
Comb Drive ◽  
Element Analysis ◽  
Microelectromechanical System ◽  
Comb Drives ◽  
High Fill Factor

Micro mirrors have emerged as key components for optical microelectromechanical system (MEMS) applications. Electrostatic vertical comb drives are attractive because they can be fabricated underneath the mirror, allowing for arrays with a high fill factor. Also, vertical comb drives are more easily controlled than parallel plate actuators, making them the better choice for analog scanning devices. The device presented in this paper is a one-degree of freedom vertical comb drive fabricated using Sandia National Laboratories SUMMiT™ five-level surface micromachining process. The electrostatic performance of the device is investigated using finite element analysis to determine the capacitance for a unit cell of the comb drive as the position of the device is varied. This information is then used to design a progressive linkage that will seek to alleviate or eliminate the effects of instability. The goal of this research is to develop an electrostatic model for the behavior of the vertical comb drive mirror and then use this to design a progressive-linkage that can delay or eliminate the pull-in instability.

Analysis of Electro-Statically Driven Micro-Electro-Mechanical Systems

2006 ◽  
Vol 306-308 ◽  
pp. 1247-1252
Author(s):  
Chong Du Cho ◽  
Byung Ha Lee
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Mesh Generation ◽  
Dynamic Equation ◽  
Comb Drive ◽  
Test Vehicle ◽  
Element Analysis ◽  
Micro Electro Mechanical Systems ◽  
The Finite Element Analysis ◽  
Topography Data

In this paper, a methodology of modeling and simulating the electro-statically driven micro-electromechanical systems (MEMS) is presented, utilizing topography data with an arbitrary structure. In the methodology, the mask layout and process recipe of a device are first generated and the model then discretized by an auto-mesh generation for the finite element analysis. Finally the analysis is performed to solve the Laplace and the dynamic equation at a time. The methodology is applied to an electro-statically driven comb-drive as a test vehicle for verification.

Finite element analysis on dental implant[ndash ]supported prostheses without passive fit

2002 ◽  
Vol 11 (1) ◽  
pp. 30-40 ◽  
Author(s):  
Chatchai Kunavisarut ◽  
Lisa A. Lang ◽  
Brian R. Stoner ◽  
David A. Felton
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Dental Implant ◽  
Element Analysis ◽  
Passive Fit

Performance enhancement of normal contact ratio gearing system through correction factor

2019 ◽  
Vol 13 (3) ◽  
pp. 5242-5258
Author(s):  
R. Ravivarman ◽  
K. Palaniradja ◽  
R. Prabhu Sekar
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Correction Factor ◽  
Bending Strength ◽  
Performance Enhancement ◽  
Transmission Ratio ◽  
Contact Ratio ◽  
Element Analysis ◽  
Normal Contact ◽  
Root Region

As lined, higher transmission ratio drives system will have uneven stresses in the root region of the pinion and wheel. To enrich this agility of uneven stresses in normal-contact ratio (NCR) gearing system, an enhanced system is desirable to be industrialized. To attain this objective, it is proposed to put on the idea of modifying the correction factor in such a manner that the bending strength of the gearing system is improved. In this work, the correction factor is modified in such a way that the stress in the root region is equalized between the pinion and wheel. This equalization of stresses is carried out by providing a correction factor in three circumstances: in pinion; wheel and both the pinion and the wheel. Henceforth performances of this S+, S0 and S- drives are evaluated in finite element analysis (FEA) and compared for balanced root stresses in parallel shaft spur gearing systems. It is seen that the outcomes gained from the modified drive have enhanced performance than the standard drive.

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