Impact of LER and Random Dopant Fluctuations on FinFET Matching Performance
2008 ◽
Vol 7
(3)
◽
pp. 291-298
◽
Keyword(s):
2020 ◽
Vol 67
(4)
◽
pp. 1485-1491
◽
2019 ◽
Vol 59
(4)
◽
pp. 339
2019 ◽
Vol 59
(4)
◽
pp. 339
◽
2016 ◽
Vol 37
(8)
◽
pp. 958-961
◽
Keyword(s):