Dynamic Matching System for Radio-Frequency Plasma Generation
2018 ◽
Vol 33
(3)
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pp. 1940-1951
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Keyword(s):
2010 ◽
Vol 19
(4)
◽
pp. 045013
◽
Keyword(s):
2013 ◽
Vol 39
(11)
◽
pp. 873-881
◽
Keyword(s):
1998 ◽
Vol 16
(4)
◽
pp. 2162-2172
◽
2021 ◽
Vol 1923
(1)
◽
pp. 012020
2013 ◽
Vol 84
(6)
◽
pp. 063904
◽
Keyword(s):
1994 ◽
Vol 138
(1-4)
◽
pp. 443-447
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Keyword(s):