Experimental Investigations of the APT-60 High-Pressure Inductively Coupled Plasma System on Different Plasma Gases

2014 ◽  
Vol 42 (12) ◽  
pp. 3891-3895 ◽  
Author(s):  
Igor Matveev ◽  
Svetlana Matveyeva ◽  
Sergey Zverev
Keyword(s):  
High Pressure ◽  
Inductively Coupled Plasma ◽  
Experimental Investigations ◽  
Plasma System ◽  
Inductively Coupled

Diamond-like amorphous carbon layer film by an inductively coupled plasma system for next generation etching hard mask

2018 ◽  
Vol 663 ◽  
pp. 21-24 ◽  
Author(s):  
Se Jun Park ◽  
Dohyung Kim ◽  
Seungmoo Lee ◽  
Yongjoon Ha ◽  
Mingyoo Lim ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Inductively Coupled Plasma ◽  
Carbon Layer ◽  
Next Generation ◽  
Plasma System ◽  
Layer Film ◽  
Hard Mask ◽  
Inductively Coupled ◽  
Amorphous Carbon Layer
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