Investigation of the Growth of Carbon Films by Ar/CH4 Plasma Jet Driven by 100-MHz/100-kHz Dual Frequency Source at Atmospheric Pressure
2016 ◽
Vol 36
(6)
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pp. 1471-1484
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2017 ◽
Vol 19
(4)
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pp. 045505
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2011 ◽
Vol 205
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pp. S71-S74
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2009 ◽
Vol 42
(22)
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pp. 222003
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2019 ◽
Vol 54
(19)
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pp. 12488-12497
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Keyword(s):
2013 ◽
Vol 133
(5)
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pp. 278-285
Keyword(s):