Study on Uniform Plasma Generation Mechanism of Electron Cyclotron Resonance Etching Reactor

2020 ◽  
Vol 48 (10) ◽  
pp. 3606-3615
Author(s):  
Hitoshi Tamura ◽  
Tsutomu Tetsuka ◽  
Daisuke Kuwahara ◽  
Shunjiro Shinohara
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Generation Mechanism ◽  
Plasma Generation ◽  
Uniform Plasma

Multi-Coil System for Electron Cyclotron Resonance Plasma Generation

1992 ◽  
Vol 31 (Part 1, No. 12B) ◽  
pp. 4343-4347
Author(s):  
Tsuyoshi Nakamura ◽  
Seiji Samukawa ◽  
Toshinori Ishida ◽  
Akihiko Ishitani ◽  
Yutaka Kawase
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Plasma Generation ◽  
Coil System ◽  
Resonance Plasma

Uniform Electron Cyclotron Resonance Plasma Generation for Precise ULSI Patterning

1992 ◽  
Vol 31 (Part 2, No. 6B) ◽  
pp. L774-L776 ◽  
Author(s):  
Seiji Samukawa ◽  
Tsuyoshi Nakamura ◽  
Toshinori Ishida ◽  
Akihiko Ishitani
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Plasma Generation ◽  
Resonance Plasma
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