Uniform plasma produced by a plane slotted antenna with magnets for electron cyclotron resonance

1993 ◽  
Vol 62 (13) ◽  
pp. 1469-1471 ◽  
Author(s):  
N. Sato ◽  
S. Iizuka ◽  
Y. Nakagawa ◽  
T. Tsukada
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Slotted Antenna ◽  
Uniform Plasma

Study on Uniform Plasma Generation Mechanism of Electron Cyclotron Resonance Etching Reactor

2020 ◽  
Vol 48 (10) ◽  
pp. 3606-3615
Author(s):  
Hitoshi Tamura ◽  
Tsutomu Tetsuka ◽  
Daisuke Kuwahara ◽  
Shunjiro Shinohara
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Generation Mechanism ◽  
Plasma Generation ◽  
Uniform Plasma

Anisotropic electron cyclotron resonance etching of tungsten films on GaAs

1994 ◽  
Vol 30 (1) ◽  
pp. 84-85 ◽  
Author(s):  
R.J. Shul ◽  
D.J. Rieger ◽  
C. Constantine ◽  
A.G. Baca ◽  
C. Barratt
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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