Quality Factor Enhancement of AlN-on-Si Lamb Wave Resonators Using a Hybrid of Phononic Crystal Shapes in Anchoring Boundaries

Author(s):  
Muhammad Wajih Ullah Siddiqi ◽  
Joshua E.-Y Lee
2012 ◽  
Vol 376 (4) ◽  
pp. 579-583 ◽  
Author(s):  
Yuanwei Yao ◽  
Fugen Wu ◽  
Xin Zhang ◽  
Zhilin Hou

2015 ◽  
Vol 29 (03) ◽  
pp. 1550002 ◽  
Author(s):  
Yinggang Li ◽  
Tianning Chen ◽  
Xiaopeng Wang

In this paper, we theoretically investigate the band structures of Lamb wave in one-dimensional radial phononic crystal (PC) slabs composed of a series of alternating strips of epoxy and aluminum. The dispersion relations, the power transmission spectra and the displacement fields of the eigenmodes are calculated by using the finite element method based on two-dimensional axial symmetry models in cylindrical coordinates. The axial symmetry model is validated by three-dimensional finite element model in Cartesian coordinates. Numerical results show that the proposed radial PC slabs can yield several complete band gaps with a variable bandwidth exist for elastic waves. Furthermore, the effects of the filling fraction and the slab thickness on the band gaps are further explored numerically. It is worth observing that, with the increase of the filling fraction, both the lower and upper edges of the band gaps are simultaneously shifted to higher frequency, which results from the enhancement interaction between the rigid resonance of the scatterer and the matrix. The slab thickness is the key parameter for the existence and the width of complete band gaps in the radial PC slabs. These properties of Lamb waves in the radial PC plates can potentially be applied to optimize band gaps, generate filters and design acoustic devices in the rotary machines and structures.


Micromachines ◽  
2019 ◽  
Vol 10 (5) ◽  
pp. 296 ◽  
Author(s):  
Muhammad Ammar Khan ◽  
Jing-Fu Bao ◽  
Fei-Hong Bao ◽  
Xin Zhou

This paper presents a novel approach of annular concentric split rings microelectromechanical resonators with tether configuration to reduce anchor loss and gives very high-quality factor (Q) 2.97 Million based on FEA (Finite Element Analysis) simulation. The operating frequencies of these resonators are 188.55 MHz to 188.62 MHz. When the proposed SR (square rectangle) hole shaped one dimensional phononic crystal (1D PnC), and two dimensional phononic crystal (2D PnC) structure consist of very wide and complete band gaps is applied to novel design rings MEMS resonators, the quality factor (Q) further improved to 19.7 Million and 1750 Million, respectively, by using the finite element method. It is also observed that band gaps become closer by reducing the value of filling fraction, and proposed SR PnC gives extensive peak attenuation. Moreover, harmonic response of ring resonator is verified by the perfect match layers (PML) technique surrounded by resonators with varying width 1.5λ, and 3λ effectively reduce the vibration displacement.


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