Solidly mounted resonator based on aluminum nitride thin film

2002 ◽  
Author(s):  
M.-A. Dubois ◽  
P. Muralt ◽  
H. Matsumoto ◽  
V. Plessky
Keyword(s):  
Thin Film ◽  
Aluminum Nitride

Aluminum Nitride Thin Film Based Surface Acoustic Wave Sensors

2008 ◽  
Author(s):  
A. Kabulski ◽  
V. R. Pagán ◽  
D. Cortes ◽  
R. Burda ◽  
O. M. Mukdadi ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Aluminum Nitride ◽  
Surface Acoustic Wave ◽  
Acoustic Wave Sensors ◽  
Wave Sensors

Pulsed DC magnetron sputtered piezoelectric thin film aluminum nitride – Technology and piezoelectric properties

2014 ◽  
Vol 116 (3) ◽  
pp. 034102 ◽  
Author(s):  
C. Stoeckel ◽  
C. Kaufmann ◽  
R. Hahn ◽  
R. Schulze ◽  
D. Billep ◽  
...  
Keyword(s):  
Thin Film ◽  
Aluminum Nitride ◽  
Piezoelectric Properties ◽  
Pulsed Dc ◽  
Piezoelectric Thin Film

Film thickness effects on the fracture of tantalum nitride on aluminum nitride thin film systems

1998 ◽  
Vol 61 (1) ◽  
pp. 107-118 ◽  
Author(s):  
N.R. Moody ◽  
D. Medlin ◽  
D. Boehme ◽  
D.P. Norwood
Keyword(s):  
Thin Film ◽  
Aluminum Nitride ◽  
Film Thickness ◽  
Tantalum Nitride

Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride

2020 ◽  
pp. 1-1 ◽  
Author(s):  
Katja Meinel ◽  
Chris Stoeckel ◽  
Marcel Melzer ◽  
Sven Zimmermann ◽  
Roman Forke ◽  
...  
Keyword(s):  
Thin Film ◽  
Aluminum Nitride

scholarly journals Fabrication of Aluminum Nitride Thin Film and Its Oxidation Behavior

2006 ◽  
Vol 55 (8) ◽  
pp. 785-789 ◽  
Author(s):  
Masashi YAMASHITA ◽  
Yukichi SASAKI ◽  
Hiroki ITO ◽  
Hitoshi OHSATO ◽  
Noriyoshi SHIBATA
Keyword(s):  
Thin Film ◽  
Aluminum Nitride ◽  
Oxidation Behavior
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