HfO2 high-k dielectric layers in air-coupled capacitive ultrasonic transducers

2011 IEEE International Ultrasonics Symposium ◽

10.1109/ultsym.2011.0211 ◽

2011 ◽

Author(s):

Sean G. McSweeney ◽

William M. D. Wright

Keyword(s):

Ultrasonic Transducers ◽

Dielectric Layers ◽

High K ◽

High K Dielectric

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Studies of air-coupled capacitive ultrasonic transducers with TiO2 high-k dielectric backplate electrode coatings

2012 IEEE International Ultrasonics Symposium ◽

10.1109/ultsym.2012.0597 ◽

2012 ◽

Author(s):

William M. D. Wright ◽

Sean G. McSweeney

Keyword(s):

Ultrasonic Transducers ◽

High K ◽

High K Dielectric

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Medium energy ion scattering for the high depth resolution characterisation of high-k dielectric layers of nanometer thickness

Applied Surface Science ◽

10.1016/j.apsusc.2013.02.003 ◽

2013 ◽

Vol 281 ◽

pp. 8-16 ◽

Author(s):

J.A. van den Berg ◽

M.A. Reading ◽

P. Bailey ◽

T.Q.C. Noakes ◽

C. Adelmann ◽

...

Keyword(s):

Depth Resolution ◽

Medium Energy ◽

Ion Scattering ◽

Dielectric Layers ◽

High K ◽

Medium Energy Ion Scattering ◽

High K Dielectric ◽

Nanometer Thickness ◽

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High-k Dielectric Layers for Bioelectronic Applications

IEICE Transactions on Electronics ◽

10.1093/ietele/e91-c.12.1894 ◽

2008 ◽

Vol E91-C (12) ◽

pp. 1894-1898

Author(s):

D. BORSTLAP ◽

J. SCHUBERT ◽

W. ZANDER ◽

A. OFFENHAUSSER ◽

S. INGEBRANDT

Keyword(s):

Dielectric Layers ◽

High K ◽

High K Dielectric

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Non-Destructive Characterization and Metrology for Ultra-Thin High-k Dielectric Layers

10.1063/1.1622463 ◽

2003 ◽

Author(s):

R. Champaneria

Keyword(s):

Dielectric Layers ◽

High K ◽

High K Dielectric ◽

Non Destructive ◽

Non Destructive Characterization

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Behaviour of injected electrons in high-k dielectric layers

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2006.10.015 ◽

2006 ◽

Vol 9 (6) ◽

pp. 985-988 ◽

Author(s):

R. Avichail-Bibi ◽

A. Kiv ◽

T. Maximova ◽

Y. Roizin ◽

D. Fuks

Keyword(s):

Dielectric Layers ◽

High K ◽

High K Dielectric

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Open Circuit Potential Analysis as a Fast Screening Method for the Quality of High-k Dielectric Layers

Solid State Phenomena ◽

10.4028/www.scientific.net/ssp.92.7 ◽

2003 ◽

Vol 92 ◽

pp. 7-10 ◽

Author(s):

Martine Claes ◽

T. Witters ◽

G. Loriaux ◽

S. Van Elshocht ◽

A. Delabie ◽

...

Keyword(s):

Open Circuit Potential ◽

Screening Method ◽

Open Circuit ◽

Potential Analysis ◽

Fast Screening ◽

Dielectric Layers ◽

High K ◽

High K Dielectric

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Electrical Scanning Probe Microscopy Techniques for the Detailed Characterization of High-k Dielectric Layers

ECS Meeting Abstracts ◽

10.1149/ma2010-01/18/986 ◽

2010 ◽

Keyword(s):

Scanning Probe Microscopy ◽

Scanning Probe ◽

Detailed Characterization ◽

Probe Microscopy ◽

Dielectric Layers ◽

High K ◽

High K Dielectric ◽

Microscopy Techniques

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Atomic Layer Deposition of High-k Dielectric Layers on Ge and III-V MOS Channels

ECS Transactions ◽

10.1149/1.2986824 ◽

2019 ◽

Vol 16 (10) ◽

pp. 671-685 ◽

Author(s):

Annelies Delabie ◽

A. Alian ◽

Florence Bellenger ◽

Guy Brammertz ◽

David P. Brunco ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Dielectric Layers ◽

Layer Deposition ◽

High K ◽

High K Dielectric

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Atomic Layer Deposition of High-k Dielectric Layers on Ge and III-V MOS Channels

ECS Meeting Abstracts ◽

10.1149/ma2008-02/37/2449 ◽

2008 ◽

Keyword(s):

Atomic Layer Deposition ◽

Atomic Layer ◽

Dielectric Layers ◽

Layer Deposition ◽

High K ◽

High K Dielectric

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Defects in stacks of Si with nanometre thick high- k dielectric layers

High k Gate Dielectrics - Series in Material Science and Engineering ◽

10.1201/9781420034141.ch3.2 ◽

2003 ◽

Author(s):

A Stesmans ◽

V Afanas’ev

Keyword(s):

Dielectric Layers ◽

High K ◽

High K Dielectric

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