Threshold voltage tuning by metal gate work function modulation for 10 nm CMOS integration and beyond

2014 ◽  
Author(s):  
Naomi Yoshida ◽  
Keping Han ◽  
Peng-Fu Hsu ◽  
Matthew Beach ◽  
Xinliang Lu ◽  
...  
Keyword(s):  
Work Function ◽  
Threshold Voltage ◽  
Metal Gate ◽  
Gate Work Function ◽  
Voltage Tuning

scholarly journals Performance Evaluation of FD-SOI MOSFETS for Different Metal Gate Work Function

2011 ◽  
Vol 2 (1) ◽  
pp. 11-24 ◽  
Author(s):  
Deepesh Ranka ◽  
Ashwani K. Rana ◽  
Rakesh Kumar Yadav ◽  
Kamalesh Yadav ◽  
Devendra Giri
Keyword(s):  
Performance Evaluation ◽  
Work Function ◽  
Metal Gate ◽  
Gate Work Function

Oxygen incorporation in TiN for metal gate work function tuning with a replacement gate integration approach

2010 ◽  
Vol 87 (9) ◽  
pp. 1805-1807 ◽  
Author(s):  
Zilan Li ◽  
Tom Schram ◽  
Thomas Witters ◽  
Joshua Tseng ◽  
Stefan De Gendt ◽  
...  
Keyword(s):  
Work Function ◽  
Metal Gate ◽  
Oxygen Incorporation ◽  
Integration Approach ◽  
Work Function Tuning ◽  
Gate Work Function

Metal gate work function extraction using Fowler-Nordheim tunneling techniques

2005 ◽  
Vol 80 ◽  
pp. 280-283 ◽  
Author(s):  
G. Sjöblom ◽  
L. Pantisano ◽  
T. Schram ◽  
J. Olsson ◽  
V. Afanas’ev ◽  
...  
Keyword(s):  
Work Function ◽  
Metal Gate ◽  
Nordheim Tunneling ◽  
Gate Work Function

Dipole model explaining high-k/metal gate field effect transistor threshold voltage tuning

2008 ◽  
Vol 92 (9) ◽  
pp. 092901 ◽  
Author(s):  
P. D. Kirsch ◽  
P. Sivasubramani ◽  
J. Huang ◽  
C. D. Young ◽  
M. A. Quevedo-Lopez ◽  
...  
Keyword(s):  
Threshold Voltage ◽  
Field Effect ◽  
Field Effect Transistor ◽  
Dipole Model ◽  
Metal Gate ◽  
High K ◽  
Effect Transistor ◽  
Voltage Tuning
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