Pre-Metal Dielectric Stress Engineering by a Novel Plasma Treatment and Integration Scheme for nMOS Performance Improvement
2013 ◽
Vol 62
(3)
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pp. 486-489
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2009 ◽
Vol 30
(10)
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pp. 1033-1035
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2020 ◽
Vol 49
◽
pp. 1-6
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Keyword(s):
2012 ◽
Vol 48
(7)
◽
pp. 922-926
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